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CMP Dashboard
Real-time status, alarms, and events for all CMP tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
CMP-001
CMP-002
CMP-003
CMP-004
CMP-005
CMP-006
CMP-007
CMP-008
CMP-009
CMP-010
CMP-011
CMP-012
CMP-013
CMP-014
CMP-015
CMP-016
CMP-017
CMP-018
CMP-019
CMP-020
CMP-021
CMP-022
CMP-023
CMP-024
CMP-025
CMP-026
CMP-027
CMP-028
CMP-029
CMP-030
CMP-031
CMP-032
CMP-033
CMP-034
CMP-035
CMP-036
CMP-037
CMP-038
CMP-039
CMP-040
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
CMP-011
Warning
Polishing pad wear-out
...
CMP-039
Warning
Slurry flow rate incorrect
...
CMP-035
Warning
Platen motor overload
...
CMP-015
Critical
Polishing pad wear-out
...
CMP-039
Warning
Slurry flow rate incorrect
...
CMP-011
Critical
Slurry flow rate incorrect
...
CMP-031
Critical
Slurry flow rate incorrect
...
CMP-003
Warning
Polishing pad wear-out
...
CMP-014
Warning
Slurry flow rate incorrect
...
CMP-018
Warning
Slurry flow rate incorrect
...
CMP-002
Major
Slurry flow rate incorrect
...
CMP-001
Major
Polishing pad wear-out
...
CMP-011
Warning
Slurry flow rate incorrect
...
CMP-032
Critical
Platen motor overload
...
CMP-007
Warning
Slurry flow rate incorrect
...
CMP-032
Critical
Slurry flow rate incorrect
...
CMP-021
Warning
Slurry flow rate incorrect
...
CMP-029
Critical
Polishing pad wear-out
...
CMP-013
Critical
Slurry flow rate incorrect
...
CMP-026
Critical
Platen motor overload
...
CMP-014
Critical
Platen motor overload
...
CMP-001
Critical
Polishing pad wear-out
...
CMP-032
Warning
Slurry flow rate incorrect
...
CMP-038
Minor
Polishing pad wear-out
...
CMP-010
Minor
Polishing pad wear-out
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
CMP-014
MaterialUnloaded
5
...
CMP-009
ProcessingStarted
32
...
CMP-005
ProcessingCompleted
33
...
CMP-031
ControlStateChanged
37
...
CMP-029
MaterialUnloaded
39
...
CMP-006
MaterialUnloaded
31
...
CMP-014
MaterialLoaded
81
...
CMP-040
MaterialLoaded
23
...
CMP-022
ProcessingCompleted
34
...
CMP-018
MaterialUnloaded
98
...
CMP-005
MaterialUnloaded
22
...
CMP-036
MaterialUnloaded
20
...
CMP-013
MaterialUnloaded
33
...
CMP-034
ProcessingStarted
80
...
CMP-020
ProcessingCompleted
23
...
CMP-008
MaterialLoaded
0
...
CMP-019
MaterialLoaded
23
...
CMP-019
MaterialLoaded
71
...
CMP-002
ProcessingStarted
31
...
CMP-029
ProcessingStarted
85
...
CMP-033
ControlStateChanged
90
...
CMP-014
MaterialUnloaded
22
...
CMP-004
ProcessingStarted
22
...
CMP-012
ProcessingCompleted
89
...
CMP-034
ControlStateChanged
28
...
CMP-019
ProcessingStarted
29
...
CMP-002
MaterialLoaded
11
...
CMP-014
MaterialUnloaded
19
...
CMP-001
MaterialUnloaded
20
...
CMP-016
MaterialLoaded
12
...
CMP-017
ControlStateChanged
15
...
CMP-006
ControlStateChanged
99
...
CMP-025
ProcessingCompleted
4
...
CMP-036
MaterialLoaded
37
...
CMP-040
ProcessingCompleted
94
...
CMP-005
MaterialUnloaded
38
...
CMP-017
ProcessingStarted
9
...
CMP-025
MaterialLoaded
7
...
CMP-005
MaterialLoaded
96
...
CMP-036
ProcessingCompleted
18
...
CMP-036
ProcessingCompleted
33
...
CMP-005
MaterialUnloaded
15
...
CMP-034
ProcessingStarted
23
...
CMP-030
MaterialUnloaded
14
...
CMP-006
ControlStateChanged
18
...
CMP-001
MaterialLoaded
29
...
CMP-008
MaterialUnloaded
95
...
CMP-024
ControlStateChanged
39
...
CMP-032
MaterialUnloaded
37
...
CMP-040
ProcessingCompleted
27
...