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CMP Dashboard
Real-time status, alarms, and events for all CMP tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
CMP-001
CMP-002
CMP-003
CMP-004
CMP-005
CMP-006
CMP-007
CMP-008
CMP-009
CMP-010
CMP-011
CMP-012
CMP-013
CMP-014
CMP-015
CMP-016
CMP-017
CMP-018
CMP-019
CMP-020
CMP-021
CMP-022
CMP-023
CMP-024
CMP-025
CMP-026
CMP-027
CMP-028
CMP-029
CMP-030
CMP-031
CMP-032
CMP-033
CMP-034
CMP-035
CMP-036
CMP-037
CMP-038
CMP-039
CMP-040
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
CMP-012
Warning
Platen motor overload
...
CMP-009
Warning
Platen motor overload
...
CMP-009
Warning
Platen motor overload
...
CMP-007
Warning
Polishing pad wear-out
...
CMP-015
Major
Polishing pad wear-out
...
CMP-038
Warning
Polishing pad wear-out
...
CMP-023
Critical
Slurry flow rate incorrect
...
CMP-012
Critical
Platen motor overload
...
CMP-017
Warning
Platen motor overload
...
CMP-028
Major
Slurry flow rate incorrect
...
CMP-008
Critical
Slurry flow rate incorrect
...
CMP-010
Critical
Slurry flow rate incorrect
...
CMP-007
Major
Platen motor overload
...
CMP-012
Warning
Platen motor overload
...
CMP-018
Major
Polishing pad wear-out
...
CMP-005
Warning
Polishing pad wear-out
...
CMP-027
Major
Platen motor overload
...
CMP-006
Minor
Platen motor overload
...
CMP-029
Critical
Polishing pad wear-out
...
CMP-033
Warning
Polishing pad wear-out
...
CMP-010
Major
Slurry flow rate incorrect
...
CMP-019
Critical
Polishing pad wear-out
...
CMP-018
Warning
Slurry flow rate incorrect
...
CMP-031
Warning
Slurry flow rate incorrect
...
CMP-040
Warning
Platen motor overload
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
CMP-026
MaterialUnloaded
25
...
CMP-007
ProcessingStarted
18
...
CMP-019
ControlStateChanged
1
...
CMP-021
ControlStateChanged
35
...
CMP-005
MaterialUnloaded
26
...
CMP-015
ControlStateChanged
18
...
CMP-035
MaterialUnloaded
5
...
CMP-037
ProcessingCompleted
20
...
CMP-037
ProcessingCompleted
25
...
CMP-037
MaterialLoaded
38
...
CMP-005
MaterialUnloaded
24
...
CMP-037
ControlStateChanged
33
...
CMP-011
MaterialLoaded
19
...
CMP-019
MaterialUnloaded
32
...
CMP-031
ProcessingStarted
5
...
CMP-005
ProcessingCompleted
77
...
CMP-034
ProcessingCompleted
29
...
CMP-014
ProcessingStarted
89
...
CMP-032
MaterialLoaded
17
...
CMP-037
MaterialLoaded
1
...
CMP-010
ProcessingStarted
93
...
CMP-004
ControlStateChanged
8
...
CMP-020
MaterialLoaded
21
...
CMP-016
MaterialLoaded
13
...
CMP-010
ControlStateChanged
38
...
CMP-020
ControlStateChanged
83
...
CMP-010
ProcessingCompleted
34
...
CMP-037
ControlStateChanged
36
...
CMP-032
MaterialUnloaded
87
...
CMP-005
ControlStateChanged
1
...
CMP-037
MaterialLoaded
22
...
CMP-002
ProcessingStarted
23
...
CMP-002
MaterialUnloaded
79
...
CMP-029
MaterialUnloaded
29
...
CMP-040
ProcessingCompleted
38
...
CMP-031
ProcessingCompleted
91
...
CMP-020
ProcessingCompleted
23
...
CMP-013
ControlStateChanged
32
...
CMP-027
ControlStateChanged
38
...
CMP-039
ProcessingStarted
25
...
CMP-012
ControlStateChanged
37
...
CMP-001
ProcessingStarted
33
...
CMP-023
MaterialUnloaded
98
...
CMP-029
ProcessingCompleted
28
...
CMP-011
ProcessingStarted
94
...
CMP-010
ControlStateChanged
39
...
CMP-035
ProcessingStarted
1
...
CMP-032
ProcessingCompleted
22
...
CMP-014
ControlStateChanged
26
...
CMP-017
MaterialLoaded
34
...