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CMP Dashboard
Real-time status, alarms, and events for all CMP tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
CMP-001
CMP-002
CMP-003
CMP-004
CMP-005
CMP-006
CMP-007
CMP-008
CMP-009
CMP-010
CMP-011
CMP-012
CMP-013
CMP-014
CMP-015
CMP-016
CMP-017
CMP-018
CMP-019
CMP-020
CMP-021
CMP-022
CMP-023
CMP-024
CMP-025
CMP-026
CMP-027
CMP-028
CMP-029
CMP-030
CMP-031
CMP-032
CMP-033
CMP-034
CMP-035
CMP-036
CMP-037
CMP-038
CMP-039
CMP-040
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
CMP-039
Critical
Slurry flow rate incorrect
...
CMP-039
Major
Slurry flow rate incorrect
...
CMP-033
Major
Polishing pad wear-out
...
CMP-008
Critical
Platen motor overload
...
CMP-013
Warning
Slurry flow rate incorrect
...
CMP-016
Minor
Platen motor overload
...
CMP-036
Critical
Polishing pad wear-out
...
CMP-025
Critical
Polishing pad wear-out
...
CMP-015
Warning
Platen motor overload
...
CMP-013
Critical
Platen motor overload
...
CMP-027
Critical
Platen motor overload
...
CMP-039
Minor
Polishing pad wear-out
...
CMP-014
Warning
Platen motor overload
...
CMP-006
Critical
Slurry flow rate incorrect
...
CMP-024
Minor
Slurry flow rate incorrect
...
CMP-019
Minor
Polishing pad wear-out
...
CMP-008
Minor
Polishing pad wear-out
...
CMP-029
Major
Polishing pad wear-out
...
CMP-037
Major
Polishing pad wear-out
...
CMP-032
Critical
Polishing pad wear-out
...
CMP-022
Major
Platen motor overload
...
CMP-034
Major
Polishing pad wear-out
...
CMP-023
Major
Slurry flow rate incorrect
...
CMP-031
Minor
Polishing pad wear-out
...
CMP-005
Critical
Platen motor overload
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
CMP-013
ProcessingCompleted
14
...
CMP-029
ControlStateChanged
39
...
CMP-004
MaterialLoaded
2
...
CMP-037
ControlStateChanged
38
...
CMP-013
ProcessingStarted
23
...
CMP-033
MaterialLoaded
6
...
CMP-010
MaterialLoaded
1
...
CMP-028
ProcessingCompleted
95
...
CMP-031
MaterialUnloaded
23
...
CMP-027
MaterialLoaded
37
...
CMP-010
ProcessingStarted
25
...
CMP-022
ProcessingStarted
94
...
CMP-015
ProcessingStarted
5
...
CMP-032
ProcessingCompleted
23
...
CMP-029
MaterialUnloaded
38
...
CMP-033
ProcessingCompleted
38
...
CMP-009
MaterialUnloaded
79
...
CMP-011
MaterialLoaded
26
...
CMP-018
ControlStateChanged
34
...
CMP-008
MaterialLoaded
34
...
CMP-016
MaterialUnloaded
38
...
CMP-029
ControlStateChanged
30
...
CMP-026
ProcessingCompleted
26
...
CMP-038
ProcessingStarted
78
...
CMP-011
MaterialLoaded
25
...
CMP-020
ControlStateChanged
20
...
CMP-013
ControlStateChanged
8
...
CMP-030
ProcessingCompleted
90
...
CMP-012
MaterialLoaded
8
...
CMP-018
ControlStateChanged
20
...
CMP-021
ProcessingStarted
4
...
CMP-006
ProcessingStarted
12
...
CMP-020
ControlStateChanged
8
...
CMP-031
MaterialUnloaded
15
...
CMP-025
ControlStateChanged
18
...
CMP-026
ControlStateChanged
13
...
CMP-038
ProcessingStarted
8
...
CMP-004
ControlStateChanged
78
...
CMP-015
ProcessingStarted
39
...
CMP-034
MaterialUnloaded
9
...
CMP-016
ProcessingStarted
35
...
CMP-009
MaterialLoaded
18
...
CMP-040
MaterialUnloaded
10
...
CMP-027
MaterialLoaded
25
...
CMP-017
MaterialUnloaded
34
...
CMP-011
ProcessingCompleted
30
...
CMP-038
ControlStateChanged
39
...
CMP-013
ProcessingStarted
86
...
CMP-026
ProcessingStarted
26
...
CMP-040
ProcessingCompleted
18
...