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CMP Dashboard
Real-time status, alarms, and events for all CMP tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
CMP-001
CMP-002
CMP-003
CMP-004
CMP-005
CMP-006
CMP-007
CMP-008
CMP-009
CMP-010
CMP-011
CMP-012
CMP-013
CMP-014
CMP-015
CMP-016
CMP-017
CMP-018
CMP-019
CMP-020
CMP-021
CMP-022
CMP-023
CMP-024
CMP-025
CMP-026
CMP-027
CMP-028
CMP-029
CMP-030
CMP-031
CMP-032
CMP-033
CMP-034
CMP-035
CMP-036
CMP-037
CMP-038
CMP-039
CMP-040
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
CMP-006
Critical
Platen motor overload
...
CMP-013
Critical
Slurry flow rate incorrect
...
CMP-032
Major
Slurry flow rate incorrect
...
CMP-034
Minor
Platen motor overload
...
CMP-018
Critical
Slurry flow rate incorrect
...
CMP-016
Major
Slurry flow rate incorrect
...
CMP-010
Warning
Slurry flow rate incorrect
...
CMP-014
Critical
Platen motor overload
...
CMP-026
Critical
Slurry flow rate incorrect
...
CMP-023
Minor
Platen motor overload
...
CMP-026
Warning
Polishing pad wear-out
...
CMP-009
Critical
Polishing pad wear-out
...
CMP-034
Major
Slurry flow rate incorrect
...
CMP-019
Warning
Platen motor overload
...
CMP-021
Minor
Platen motor overload
...
CMP-018
Warning
Polishing pad wear-out
...
CMP-012
Critical
Slurry flow rate incorrect
...
CMP-014
Warning
Platen motor overload
...
CMP-031
Warning
Polishing pad wear-out
...
CMP-039
Warning
Platen motor overload
...
CMP-031
Minor
Slurry flow rate incorrect
...
CMP-035
Warning
Platen motor overload
...
CMP-004
Critical
Polishing pad wear-out
...
CMP-040
Critical
Polishing pad wear-out
...
CMP-016
Warning
Polishing pad wear-out
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
CMP-028
ControlStateChanged
10
...
CMP-014
MaterialUnloaded
17
...
CMP-031
ProcessingCompleted
2
...
CMP-025
ProcessingCompleted
13
...
CMP-034
ControlStateChanged
14
...
CMP-022
ControlStateChanged
19
...
CMP-010
ControlStateChanged
13
...
CMP-012
MaterialLoaded
4
...
CMP-029
ProcessingStarted
0
...
CMP-021
MaterialUnloaded
33
...
CMP-012
ProcessingCompleted
28
...
CMP-032
MaterialUnloaded
3
...
CMP-029
ControlStateChanged
12
...
CMP-027
ControlStateChanged
85
...
CMP-014
ProcessingCompleted
18
...
CMP-031
ControlStateChanged
14
...
CMP-021
ControlStateChanged
7
...
CMP-018
ProcessingStarted
35
...
CMP-004
ProcessingCompleted
27
...
CMP-018
ProcessingCompleted
17
...
CMP-025
ProcessingStarted
7
...
CMP-023
ProcessingCompleted
13
...
CMP-016
ProcessingStarted
9
...
CMP-017
ProcessingStarted
18
...
CMP-025
MaterialUnloaded
36
...
CMP-040
MaterialUnloaded
29
...
CMP-012
ProcessingStarted
97
...
CMP-021
MaterialLoaded
8
...
CMP-008
ProcessingCompleted
6
...
CMP-024
MaterialUnloaded
15
...
CMP-024
MaterialLoaded
13
...
CMP-038
MaterialLoaded
18
...
CMP-023
MaterialUnloaded
33
...
CMP-003
MaterialLoaded
14
...
CMP-009
ControlStateChanged
29
...
CMP-002
MaterialUnloaded
20
...
CMP-016
ProcessingCompleted
38
...
CMP-001
ControlStateChanged
3
...
CMP-012
MaterialUnloaded
4
...
CMP-028
ControlStateChanged
25
...
CMP-016
ProcessingStarted
35
...
CMP-034
MaterialUnloaded
30
...
CMP-006
ProcessingCompleted
11
...
CMP-009
MaterialUnloaded
39
...
CMP-017
ControlStateChanged
34
...
CMP-023
MaterialLoaded
5
...
CMP-007
ProcessingStarted
0
...
CMP-015
ProcessingStarted
8
...
CMP-004
ProcessingCompleted
39
...
CMP-007
MaterialUnloaded
11
...