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CMP Dashboard
Real-time status, alarms, and events for all CMP tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
CMP-001
CMP-002
CMP-003
CMP-004
CMP-005
CMP-006
CMP-007
CMP-008
CMP-009
CMP-010
CMP-011
CMP-012
CMP-013
CMP-014
CMP-015
CMP-016
CMP-017
CMP-018
CMP-019
CMP-020
CMP-021
CMP-022
CMP-023
CMP-024
CMP-025
CMP-026
CMP-027
CMP-028
CMP-029
CMP-030
CMP-031
CMP-032
CMP-033
CMP-034
CMP-035
CMP-036
CMP-037
CMP-038
CMP-039
CMP-040
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
CMP-004
Critical
Slurry flow rate incorrect
...
CMP-036
Major
Polishing pad wear-out
...
CMP-026
Critical
Slurry flow rate incorrect
...
CMP-033
Warning
Polishing pad wear-out
...
CMP-015
Warning
Slurry flow rate incorrect
...
CMP-024
Critical
Polishing pad wear-out
...
CMP-022
Critical
Platen motor overload
...
CMP-005
Minor
Platen motor overload
...
CMP-031
Minor
Polishing pad wear-out
...
CMP-014
Major
Polishing pad wear-out
...
CMP-013
Minor
Slurry flow rate incorrect
...
CMP-017
Critical
Polishing pad wear-out
...
CMP-001
Critical
Slurry flow rate incorrect
...
CMP-013
Warning
Polishing pad wear-out
...
CMP-004
Major
Slurry flow rate incorrect
...
CMP-013
Warning
Slurry flow rate incorrect
...
CMP-036
Critical
Platen motor overload
...
CMP-035
Major
Platen motor overload
...
CMP-018
Critical
Platen motor overload
...
CMP-038
Warning
Platen motor overload
...
CMP-032
Warning
Platen motor overload
...
CMP-027
Minor
Platen motor overload
...
CMP-038
Major
Polishing pad wear-out
...
CMP-009
Major
Polishing pad wear-out
...
CMP-037
Major
Platen motor overload
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
CMP-015
MaterialUnloaded
27
...
CMP-003
ProcessingStarted
92
...
CMP-006
MaterialUnloaded
90
...
CMP-018
ControlStateChanged
9
...
CMP-037
MaterialUnloaded
3
...
CMP-001
MaterialLoaded
39
...
CMP-021
MaterialUnloaded
33
...
CMP-035
ProcessingCompleted
6
...
CMP-033
ProcessingCompleted
11
...
CMP-015
ProcessingCompleted
14
...
CMP-040
ProcessingStarted
15
...
CMP-030
MaterialUnloaded
9
...
CMP-014
MaterialLoaded
5
...
CMP-030
ProcessingStarted
14
...
CMP-039
ControlStateChanged
9
...
CMP-036
ProcessingStarted
23
...
CMP-036
ProcessingStarted
7
...
CMP-010
MaterialLoaded
20
...
CMP-011
MaterialLoaded
37
...
CMP-007
ProcessingStarted
37
...
CMP-005
ProcessingCompleted
9
...
CMP-039
ProcessingStarted
76
...
CMP-026
ProcessingCompleted
94
...
CMP-002
ProcessingCompleted
14
...
CMP-017
ProcessingCompleted
17
...
CMP-001
ProcessingStarted
13
...
CMP-030
ControlStateChanged
25
...
CMP-007
MaterialUnloaded
25
...
CMP-010
ProcessingStarted
1
...
CMP-001
MaterialUnloaded
28
...
CMP-009
MaterialLoaded
29
...
CMP-014
MaterialUnloaded
28
...
CMP-039
ControlStateChanged
5
...
CMP-016
ControlStateChanged
21
...
CMP-007
ProcessingCompleted
71
...
CMP-030
MaterialLoaded
2
...
CMP-040
ProcessingCompleted
37
...
CMP-003
ProcessingCompleted
15
...
CMP-030
MaterialLoaded
30
...
CMP-029
ControlStateChanged
13
...
CMP-021
ControlStateChanged
9
...
CMP-019
MaterialUnloaded
32
...
CMP-035
MaterialLoaded
8
...
CMP-001
MaterialLoaded
23
...
CMP-034
ProcessingStarted
34
...
CMP-017
MaterialUnloaded
15
...
CMP-020
MaterialUnloaded
20
...
CMP-022
ControlStateChanged
11
...
CMP-017
ProcessingCompleted
0
...
CMP-024
ProcessingStarted
30
...