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CMP Dashboard
Real-time status, alarms, and events for all CMP tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
CMP-001
CMP-002
CMP-003
CMP-004
CMP-005
CMP-006
CMP-007
CMP-008
CMP-009
CMP-010
CMP-011
CMP-012
CMP-013
CMP-014
CMP-015
CMP-016
CMP-017
CMP-018
CMP-019
CMP-020
CMP-021
CMP-022
CMP-023
CMP-024
CMP-025
CMP-026
CMP-027
CMP-028
CMP-029
CMP-030
CMP-031
CMP-032
CMP-033
CMP-034
CMP-035
CMP-036
CMP-037
CMP-038
CMP-039
CMP-040
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
CMP-015
Warning
Slurry flow rate incorrect
...
CMP-021
Minor
Polishing pad wear-out
...
CMP-012
Warning
Slurry flow rate incorrect
...
CMP-005
Minor
Polishing pad wear-out
...
CMP-015
Critical
Slurry flow rate incorrect
...
CMP-038
Critical
Polishing pad wear-out
...
CMP-024
Minor
Platen motor overload
...
CMP-008
Warning
Platen motor overload
...
CMP-029
Warning
Platen motor overload
...
CMP-035
Critical
Polishing pad wear-out
...
CMP-012
Warning
Platen motor overload
...
CMP-033
Critical
Polishing pad wear-out
...
CMP-034
Warning
Polishing pad wear-out
...
CMP-026
Critical
Platen motor overload
...
CMP-021
Major
Platen motor overload
...
CMP-002
Major
Platen motor overload
...
CMP-008
Critical
Platen motor overload
...
CMP-021
Minor
Platen motor overload
...
CMP-018
Minor
Slurry flow rate incorrect
...
CMP-030
Critical
Slurry flow rate incorrect
...
CMP-013
Major
Polishing pad wear-out
...
CMP-030
Minor
Slurry flow rate incorrect
...
CMP-030
Major
Slurry flow rate incorrect
...
CMP-023
Warning
Slurry flow rate incorrect
...
CMP-027
Critical
Slurry flow rate incorrect
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
CMP-009
ControlStateChanged
13
...
CMP-029
ProcessingStarted
32
...
CMP-024
ProcessingStarted
23
...
CMP-033
MaterialUnloaded
31
...
CMP-037
ProcessingCompleted
8
...
CMP-015
ProcessingCompleted
17
...
CMP-024
ControlStateChanged
25
...
CMP-029
ControlStateChanged
4
...
CMP-023
ControlStateChanged
36
...
CMP-010
ProcessingStarted
39
...
CMP-013
MaterialUnloaded
1
...
CMP-035
ProcessingStarted
95
...
CMP-035
MaterialLoaded
9
...
CMP-027
MaterialLoaded
9
...
CMP-037
MaterialLoaded
5
...
CMP-026
MaterialLoaded
14
...
CMP-031
ProcessingStarted
94
...
CMP-038
ControlStateChanged
24
...
CMP-025
ProcessingCompleted
34
...
CMP-014
ControlStateChanged
73
...
CMP-014
MaterialLoaded
0
...
CMP-040
ProcessingStarted
27
...
CMP-038
ProcessingStarted
30
...
CMP-032
MaterialUnloaded
79
...
CMP-027
MaterialLoaded
17
...
CMP-009
ProcessingStarted
31
...
CMP-012
MaterialLoaded
39
...
CMP-036
ProcessingStarted
3
...
CMP-026
MaterialUnloaded
14
...
CMP-030
MaterialUnloaded
7
...
CMP-035
ControlStateChanged
3
...
CMP-035
ProcessingStarted
18
...
CMP-010
ControlStateChanged
14
...
CMP-009
MaterialLoaded
21
...
CMP-004
ProcessingStarted
22
...
CMP-032
MaterialUnloaded
30
...
CMP-034
ProcessingCompleted
36
...
CMP-002
MaterialUnloaded
18
...
CMP-009
MaterialLoaded
38
...
CMP-008
MaterialLoaded
17
...
CMP-009
ProcessingStarted
25
...
CMP-034
ControlStateChanged
33
...
CMP-019
ProcessingStarted
23
...
CMP-025
ProcessingStarted
24
...
CMP-039
ProcessingStarted
21
...
CMP-005
MaterialLoaded
32
...
CMP-009
ControlStateChanged
8
...
CMP-015
MaterialUnloaded
24
...
CMP-022
MaterialUnloaded
13
...
CMP-025
MaterialLoaded
18
...