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CMP Dashboard
Real-time status, alarms, and events for all CMP tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
CMP-001
CMP-002
CMP-003
CMP-004
CMP-005
CMP-006
CMP-007
CMP-008
CMP-009
CMP-010
CMP-011
CMP-012
CMP-013
CMP-014
CMP-015
CMP-016
CMP-017
CMP-018
CMP-019
CMP-020
CMP-021
CMP-022
CMP-023
CMP-024
CMP-025
CMP-026
CMP-027
CMP-028
CMP-029
CMP-030
CMP-031
CMP-032
CMP-033
CMP-034
CMP-035
CMP-036
CMP-037
CMP-038
CMP-039
CMP-040
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
CMP-014
Warning
Polishing pad wear-out
...
CMP-020
Critical
Slurry flow rate incorrect
...
CMP-028
Major
Slurry flow rate incorrect
...
CMP-025
Critical
Slurry flow rate incorrect
...
CMP-040
Critical
Slurry flow rate incorrect
...
CMP-038
Critical
Polishing pad wear-out
...
CMP-005
Critical
Platen motor overload
...
CMP-006
Major
Polishing pad wear-out
...
CMP-014
Major
Polishing pad wear-out
...
CMP-015
Warning
Platen motor overload
...
CMP-026
Major
Platen motor overload
...
CMP-038
Minor
Platen motor overload
...
CMP-001
Major
Polishing pad wear-out
...
CMP-002
Critical
Slurry flow rate incorrect
...
CMP-033
Major
Platen motor overload
...
CMP-024
Major
Slurry flow rate incorrect
...
CMP-033
Warning
Polishing pad wear-out
...
CMP-006
Major
Platen motor overload
...
CMP-040
Critical
Polishing pad wear-out
...
CMP-035
Major
Slurry flow rate incorrect
...
CMP-006
Critical
Polishing pad wear-out
...
CMP-024
Critical
Slurry flow rate incorrect
...
CMP-021
Critical
Platen motor overload
...
CMP-017
Major
Polishing pad wear-out
...
CMP-032
Critical
Polishing pad wear-out
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
CMP-037
MaterialUnloaded
82
...
CMP-021
MaterialUnloaded
31
...
CMP-026
MaterialUnloaded
10
...
CMP-009
MaterialLoaded
10
...
CMP-036
MaterialUnloaded
21
...
CMP-018
MaterialUnloaded
28
...
CMP-026
MaterialUnloaded
36
...
CMP-018
ProcessingStarted
78
...
CMP-004
MaterialLoaded
15
...
CMP-039
MaterialUnloaded
85
...
CMP-020
MaterialUnloaded
4
...
CMP-033
ProcessingCompleted
39
...
CMP-031
ProcessingCompleted
0
...
CMP-026
ProcessingStarted
28
...
CMP-018
MaterialLoaded
20
...
CMP-017
MaterialUnloaded
28
...
CMP-040
MaterialLoaded
24
...
CMP-024
MaterialUnloaded
77
...
CMP-020
MaterialUnloaded
6
...
CMP-006
ProcessingCompleted
22
...
CMP-010
ProcessingCompleted
26
...
CMP-027
ControlStateChanged
16
...
CMP-035
ProcessingStarted
33
...
CMP-018
ProcessingStarted
37
...
CMP-033
MaterialUnloaded
13
...
CMP-009
MaterialLoaded
93
...
CMP-017
ControlStateChanged
11
...
CMP-014
MaterialLoaded
11
...
CMP-029
ProcessingStarted
17
...
CMP-018
MaterialLoaded
4
...
CMP-016
MaterialUnloaded
28
...
CMP-008
ProcessingStarted
2
...
CMP-003
MaterialUnloaded
36
...
CMP-005
MaterialLoaded
97
...
CMP-036
ProcessingStarted
1
...
CMP-035
ProcessingStarted
11
...
CMP-009
ControlStateChanged
39
...
CMP-016
ProcessingCompleted
0
...
CMP-035
MaterialLoaded
13
...
CMP-037
MaterialUnloaded
3
...
CMP-022
MaterialUnloaded
14
...
CMP-002
MaterialUnloaded
70
...
CMP-038
MaterialUnloaded
16
...
CMP-006
ProcessingStarted
28
...
CMP-040
MaterialUnloaded
0
...
CMP-038
MaterialUnloaded
1
...
CMP-002
ControlStateChanged
27
...
CMP-019
ProcessingCompleted
26
...
CMP-031
MaterialLoaded
6
...
CMP-020
ControlStateChanged
33
...