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CMP Dashboard
Real-time status, alarms, and events for all CMP tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
CMP-001
CMP-002
CMP-003
CMP-004
CMP-005
CMP-006
CMP-007
CMP-008
CMP-009
CMP-010
CMP-011
CMP-012
CMP-013
CMP-014
CMP-015
CMP-016
CMP-017
CMP-018
CMP-019
CMP-020
CMP-021
CMP-022
CMP-023
CMP-024
CMP-025
CMP-026
CMP-027
CMP-028
CMP-029
CMP-030
CMP-031
CMP-032
CMP-033
CMP-034
CMP-035
CMP-036
CMP-037
CMP-038
CMP-039
CMP-040
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
CMP-039
Minor
Polishing pad wear-out
...
CMP-039
Critical
Polishing pad wear-out
...
CMP-039
Critical
Polishing pad wear-out
...
CMP-004
Critical
Slurry flow rate incorrect
...
CMP-016
Critical
Platen motor overload
...
CMP-010
Warning
Platen motor overload
...
CMP-036
Major
Polishing pad wear-out
...
CMP-031
Critical
Slurry flow rate incorrect
...
CMP-040
Minor
Polishing pad wear-out
...
CMP-013
Warning
Slurry flow rate incorrect
...
CMP-040
Critical
Platen motor overload
...
CMP-037
Major
Polishing pad wear-out
...
CMP-003
Major
Platen motor overload
...
CMP-033
Major
Polishing pad wear-out
...
CMP-031
Critical
Slurry flow rate incorrect
...
CMP-027
Major
Polishing pad wear-out
...
CMP-023
Major
Slurry flow rate incorrect
...
CMP-010
Warning
Polishing pad wear-out
...
CMP-017
Critical
Polishing pad wear-out
...
CMP-007
Minor
Platen motor overload
...
CMP-005
Minor
Slurry flow rate incorrect
...
CMP-026
Critical
Polishing pad wear-out
...
CMP-031
Critical
Slurry flow rate incorrect
...
CMP-006
Critical
Slurry flow rate incorrect
...
CMP-019
Critical
Polishing pad wear-out
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
CMP-024
ControlStateChanged
4
...
CMP-027
ProcessingStarted
22
...
CMP-011
ProcessingStarted
19
...
CMP-023
MaterialUnloaded
11
...
CMP-034
MaterialUnloaded
74
...
CMP-018
ProcessingCompleted
74
...
CMP-026
ProcessingCompleted
24
...
CMP-013
ProcessingCompleted
80
...
CMP-025
MaterialLoaded
30
...
CMP-025
ProcessingCompleted
85
...
CMP-029
MaterialUnloaded
12
...
CMP-030
MaterialLoaded
11
...
CMP-011
MaterialUnloaded
9
...
CMP-015
ControlStateChanged
16
...
CMP-032
MaterialUnloaded
70
...
CMP-008
MaterialLoaded
25
...
CMP-038
ControlStateChanged
23
...
CMP-013
MaterialUnloaded
0
...
CMP-030
ControlStateChanged
70
...
CMP-003
ProcessingStarted
14
...
CMP-003
ControlStateChanged
79
...
CMP-021
ProcessingStarted
39
...
CMP-027
ProcessingCompleted
38
...
CMP-004
MaterialLoaded
12
...
CMP-006
ProcessingCompleted
31
...
CMP-009
MaterialUnloaded
37
...
CMP-015
ProcessingCompleted
15
...
CMP-038
MaterialUnloaded
1
...
CMP-025
ProcessingCompleted
11
...
CMP-003
MaterialLoaded
19
...
CMP-029
MaterialUnloaded
20
...
CMP-017
ControlStateChanged
33
...
CMP-011
ProcessingStarted
19
...
CMP-013
ProcessingCompleted
19
...
CMP-027
ProcessingCompleted
75
...
CMP-007
ControlStateChanged
5
...
CMP-021
ControlStateChanged
20
...
CMP-026
ProcessingStarted
21
...
CMP-023
ControlStateChanged
35
...
CMP-005
MaterialLoaded
77
...
CMP-015
ProcessingStarted
12
...
CMP-025
MaterialUnloaded
36
...
CMP-025
ProcessingStarted
13
...
CMP-003
ProcessingCompleted
22
...
CMP-033
ProcessingStarted
36
...
CMP-022
ProcessingCompleted
21
...
CMP-039
ProcessingStarted
13
...
CMP-038
MaterialUnloaded
17
...
CMP-032
ProcessingStarted
35
...
CMP-021
ProcessingStarted
4
...