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Etch Dashboard
Real-time status, alarms, and events for all Etch tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
ETCH-001
ETCH-002
ETCH-003
ETCH-004
ETCH-005
ETCH-006
ETCH-007
ETCH-008
ETCH-009
ETCH-010
ETCH-011
ETCH-012
ETCH-013
ETCH-014
ETCH-015
ETCH-016
ETCH-017
ETCH-018
ETCH-019
ETCH-020
ETCH-021
ETCH-022
ETCH-023
ETCH-024
ETCH-025
ETCH-026
ETCH-027
ETCH-028
ETCH-029
ETCH-030
ETCH-031
ETCH-032
ETCH-033
ETCH-034
ETCH-035
ETCH-036
ETCH-037
ETCH-038
ETCH-039
ETCH-040
ETCH-041
ETCH-042
ETCH-043
ETCH-044
ETCH-045
ETCH-046
ETCH-047
ETCH-048
ETCH-049
ETCH-050
ETCH-051
ETCH-052
ETCH-053
ETCH-054
ETCH-055
ETCH-056
ETCH-057
ETCH-058
ETCH-059
ETCH-060
ETCH-061
ETCH-062
ETCH-063
ETCH-064
ETCH-065
ETCH-066
ETCH-067
ETCH-068
ETCH-069
ETCH-070
ETCH-071
ETCH-072
ETCH-073
ETCH-074
ETCH-075
ETCH-076
ETCH-077
ETCH-078
ETCH-079
ETCH-080
ETCH-081
ETCH-082
ETCH-083
ETCH-084
ETCH-085
ETCH-086
ETCH-087
ETCH-088
ETCH-089
ETCH-090
ETCH-091
ETCH-092
ETCH-093
ETCH-094
ETCH-095
ETCH-096
ETCH-097
ETCH-098
ETCH-099
ETCH-100
ETCH-101
ETCH-102
ETCH-103
ETCH-104
ETCH-105
ETCH-106
ETCH-107
ETCH-108
ETCH-109
ETCH-110
ETCH-111
ETCH-112
ETCH-113
ETCH-114
ETCH-115
ETCH-116
ETCH-117
ETCH-118
ETCH-119
ETCH-120
ETCH-121
ETCH-122
ETCH-123
ETCH-124
ETCH-125
ETCH-126
ETCH-127
ETCH-128
ETCH-129
ETCH-130
ETCH-131
ETCH-132
ETCH-133
ETCH-134
ETCH-135
ETCH-136
ETCH-137
ETCH-138
ETCH-139
ETCH-140
ETCH-141
ETCH-142
ETCH-143
ETCH-144
ETCH-145
ETCH-146
ETCH-147
ETCH-148
ETCH-149
ETCH-150
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Scheduled Down
Unscheduled Down
Processing
Idle
Engineering
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
ETCH-127
Critical
Gas flow controller fault
...
ETCH-017
Minor
Endpoint detection error
...
ETCH-014
Critical
Gas flow controller fault
...
ETCH-127
Critical
Plasma ignition failure
...
ETCH-060
Warning
Endpoint detection error
...
ETCH-132
Minor
Plasma ignition failure
...
ETCH-043
Major
Gas flow controller fault
...
ETCH-115
Major
Gas flow controller fault
...
ETCH-101
Minor
Endpoint detection error
...
ETCH-002
Major
Plasma ignition failure
...
ETCH-011
Minor
Gas flow controller fault
...
ETCH-089
Critical
Gas flow controller fault
...
ETCH-115
Minor
Endpoint detection error
...
ETCH-102
Critical
Plasma ignition failure
...
ETCH-121
Warning
Endpoint detection error
...
ETCH-091
Minor
Plasma ignition failure
...
ETCH-018
Major
Gas flow controller fault
...
ETCH-056
Critical
Endpoint detection error
...
ETCH-009
Warning
Endpoint detection error
...
ETCH-057
Critical
Endpoint detection error
...
ETCH-094
Major
Plasma ignition failure
...
ETCH-121
Critical
Endpoint detection error
...
ETCH-043
Major
Plasma ignition failure
...
ETCH-016
Warning
Plasma ignition failure
...
ETCH-130
Critical
Endpoint detection error
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
ETCH-113
ProcessingCompleted
71
...
ETCH-021
ProcessingCompleted
34
...
ETCH-131
ControlStateChanged
3
...
ETCH-127
MaterialUnloaded
3
...
ETCH-103
MaterialUnloaded
39
...
ETCH-086
ControlStateChanged
8
...
ETCH-060
ControlStateChanged
34
...
ETCH-148
MaterialUnloaded
19
...
ETCH-051
ProcessingStarted
23
...
ETCH-122
MaterialLoaded
38
...
ETCH-114
ProcessingStarted
83
...
ETCH-056
ControlStateChanged
70
...
ETCH-048
ControlStateChanged
38
...
ETCH-043
MaterialLoaded
37
...
ETCH-068
ProcessingStarted
13
...
ETCH-020
MaterialLoaded
28
...
ETCH-101
ControlStateChanged
39
...
ETCH-070
ProcessingCompleted
11
...
ETCH-124
ProcessingStarted
18
...
ETCH-044
MaterialLoaded
28
...
ETCH-026
MaterialLoaded
23
...
ETCH-130
ProcessingCompleted
29
...
ETCH-121
MaterialLoaded
8
...
ETCH-089
ProcessingCompleted
31
...
ETCH-065
MaterialUnloaded
19
...
ETCH-129
ControlStateChanged
3
...
ETCH-109
ControlStateChanged
26
...
ETCH-096
ProcessingStarted
5
...
ETCH-070
MaterialUnloaded
18
...
ETCH-054
MaterialLoaded
13
...
ETCH-045
MaterialLoaded
23
...
ETCH-053
ProcessingStarted
98
...
ETCH-027
ProcessingCompleted
2
...
ETCH-095
MaterialLoaded
37
...
ETCH-117
MaterialLoaded
8
...
ETCH-068
MaterialLoaded
31
...
ETCH-110
MaterialUnloaded
6
...
ETCH-113
MaterialLoaded
37
...
ETCH-138
ControlStateChanged
26
...
ETCH-029
MaterialLoaded
0
...
ETCH-135
ControlStateChanged
90
...
ETCH-070
MaterialLoaded
8
...
ETCH-128
ProcessingStarted
23
...
ETCH-013
ProcessingCompleted
26
...
ETCH-121
ControlStateChanged
96
...
ETCH-142
ProcessingStarted
9
...
ETCH-107
ControlStateChanged
17
...
ETCH-058
MaterialUnloaded
29
...
ETCH-013
ProcessingCompleted
9
...
ETCH-003
ProcessingCompleted
15
...