FabView
Semiconductor Fab
Dashboard
Litho
Etch
Thin Films
Metrology
Implant
Diffusion
Dielectrics
CMP
Query Studio
System Admin
Change Theme
Toggle Sidebar
FabView
...
Etch Dashboard
Real-time status, alarms, and events for all Etch tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
ETCH-001
ETCH-002
ETCH-003
ETCH-004
ETCH-005
ETCH-006
ETCH-007
ETCH-008
ETCH-009
ETCH-010
ETCH-011
ETCH-012
ETCH-013
ETCH-014
ETCH-015
ETCH-016
ETCH-017
ETCH-018
ETCH-019
ETCH-020
ETCH-021
ETCH-022
ETCH-023
ETCH-024
ETCH-025
ETCH-026
ETCH-027
ETCH-028
ETCH-029
ETCH-030
ETCH-031
ETCH-032
ETCH-033
ETCH-034
ETCH-035
ETCH-036
ETCH-037
ETCH-038
ETCH-039
ETCH-040
ETCH-041
ETCH-042
ETCH-043
ETCH-044
ETCH-045
ETCH-046
ETCH-047
ETCH-048
ETCH-049
ETCH-050
ETCH-051
ETCH-052
ETCH-053
ETCH-054
ETCH-055
ETCH-056
ETCH-057
ETCH-058
ETCH-059
ETCH-060
ETCH-061
ETCH-062
ETCH-063
ETCH-064
ETCH-065
ETCH-066
ETCH-067
ETCH-068
ETCH-069
ETCH-070
ETCH-071
ETCH-072
ETCH-073
ETCH-074
ETCH-075
ETCH-076
ETCH-077
ETCH-078
ETCH-079
ETCH-080
ETCH-081
ETCH-082
ETCH-083
ETCH-084
ETCH-085
ETCH-086
ETCH-087
ETCH-088
ETCH-089
ETCH-090
ETCH-091
ETCH-092
ETCH-093
ETCH-094
ETCH-095
ETCH-096
ETCH-097
ETCH-098
ETCH-099
ETCH-100
ETCH-101
ETCH-102
ETCH-103
ETCH-104
ETCH-105
ETCH-106
ETCH-107
ETCH-108
ETCH-109
ETCH-110
ETCH-111
ETCH-112
ETCH-113
ETCH-114
ETCH-115
ETCH-116
ETCH-117
ETCH-118
ETCH-119
ETCH-120
ETCH-121
ETCH-122
ETCH-123
ETCH-124
ETCH-125
ETCH-126
ETCH-127
ETCH-128
ETCH-129
ETCH-130
ETCH-131
ETCH-132
ETCH-133
ETCH-134
ETCH-135
ETCH-136
ETCH-137
ETCH-138
ETCH-139
ETCH-140
ETCH-141
ETCH-142
ETCH-143
ETCH-144
ETCH-145
ETCH-146
ETCH-147
ETCH-148
ETCH-149
ETCH-150
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Scheduled Down
Unscheduled Down
Processing
Idle
Engineering
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
ETCH-064
Major
Gas flow controller fault
...
ETCH-018
Critical
Gas flow controller fault
...
ETCH-052
Major
Plasma ignition failure
...
ETCH-075
Major
Endpoint detection error
...
ETCH-105
Critical
Plasma ignition failure
...
ETCH-103
Critical
Gas flow controller fault
...
ETCH-036
Critical
Plasma ignition failure
...
ETCH-013
Critical
Plasma ignition failure
...
ETCH-111
Warning
Plasma ignition failure
...
ETCH-061
Minor
Plasma ignition failure
...
ETCH-084
Critical
Gas flow controller fault
...
ETCH-033
Major
Gas flow controller fault
...
ETCH-115
Critical
Plasma ignition failure
...
ETCH-129
Critical
Endpoint detection error
...
ETCH-103
Critical
Endpoint detection error
...
ETCH-040
Critical
Gas flow controller fault
...
ETCH-048
Critical
Gas flow controller fault
...
ETCH-099
Minor
Plasma ignition failure
...
ETCH-087
Critical
Gas flow controller fault
...
ETCH-094
Critical
Gas flow controller fault
...
ETCH-062
Major
Plasma ignition failure
...
ETCH-119
Warning
Endpoint detection error
...
ETCH-098
Critical
Endpoint detection error
...
ETCH-112
Major
Plasma ignition failure
...
ETCH-005
Major
Plasma ignition failure
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
ETCH-068
ProcessingStarted
88
...
ETCH-118
ControlStateChanged
88
...
ETCH-117
MaterialLoaded
20
...
ETCH-049
MaterialUnloaded
24
...
ETCH-041
MaterialLoaded
13
...
ETCH-065
MaterialUnloaded
5
...
ETCH-145
MaterialLoaded
2
...
ETCH-020
MaterialUnloaded
32
...
ETCH-085
MaterialUnloaded
23
...
ETCH-135
ProcessingStarted
2
...
ETCH-089
ProcessingStarted
36
...
ETCH-048
MaterialLoaded
94
...
ETCH-092
MaterialLoaded
98
...
ETCH-030
ProcessingCompleted
27
...
ETCH-099
ProcessingCompleted
34
...
ETCH-143
MaterialLoaded
34
...
ETCH-066
ProcessingStarted
10
...
ETCH-042
ControlStateChanged
76
...
ETCH-069
MaterialLoaded
36
...
ETCH-130
ControlStateChanged
28
...
ETCH-036
MaterialLoaded
6
...
ETCH-013
ControlStateChanged
98
...
ETCH-124
MaterialLoaded
84
...
ETCH-144
ControlStateChanged
2
...
ETCH-049
MaterialUnloaded
14
...
ETCH-039
MaterialUnloaded
82
...
ETCH-028
ProcessingStarted
3
...
ETCH-079
ControlStateChanged
16
...
ETCH-133
ProcessingCompleted
20
...
ETCH-122
MaterialUnloaded
26
...
ETCH-112
ProcessingStarted
28
...
ETCH-040
ProcessingStarted
38
...
ETCH-149
MaterialUnloaded
13
...
ETCH-073
ProcessingCompleted
31
...
ETCH-138
MaterialLoaded
17
...
ETCH-035
ProcessingCompleted
5
...
ETCH-042
MaterialLoaded
32
...
ETCH-074
MaterialLoaded
4
...
ETCH-130
ControlStateChanged
0
...
ETCH-016
MaterialUnloaded
4
...
ETCH-004
ProcessingStarted
26
...
ETCH-035
MaterialLoaded
16
...
ETCH-139
ProcessingStarted
1
...
ETCH-017
MaterialUnloaded
19
...
ETCH-087
MaterialUnloaded
38
...
ETCH-081
MaterialLoaded
92
...
ETCH-020
MaterialLoaded
7
...
ETCH-111
ProcessingStarted
38
...
ETCH-004
ProcessingCompleted
24
...
ETCH-071
ControlStateChanged
30
...