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Etch Dashboard
Real-time status, alarms, and events for all Etch tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
ETCH-001
ETCH-002
ETCH-003
ETCH-004
ETCH-005
ETCH-006
ETCH-007
ETCH-008
ETCH-009
ETCH-010
ETCH-011
ETCH-012
ETCH-013
ETCH-014
ETCH-015
ETCH-016
ETCH-017
ETCH-018
ETCH-019
ETCH-020
ETCH-021
ETCH-022
ETCH-023
ETCH-024
ETCH-025
ETCH-026
ETCH-027
ETCH-028
ETCH-029
ETCH-030
ETCH-031
ETCH-032
ETCH-033
ETCH-034
ETCH-035
ETCH-036
ETCH-037
ETCH-038
ETCH-039
ETCH-040
ETCH-041
ETCH-042
ETCH-043
ETCH-044
ETCH-045
ETCH-046
ETCH-047
ETCH-048
ETCH-049
ETCH-050
ETCH-051
ETCH-052
ETCH-053
ETCH-054
ETCH-055
ETCH-056
ETCH-057
ETCH-058
ETCH-059
ETCH-060
ETCH-061
ETCH-062
ETCH-063
ETCH-064
ETCH-065
ETCH-066
ETCH-067
ETCH-068
ETCH-069
ETCH-070
ETCH-071
ETCH-072
ETCH-073
ETCH-074
ETCH-075
ETCH-076
ETCH-077
ETCH-078
ETCH-079
ETCH-080
ETCH-081
ETCH-082
ETCH-083
ETCH-084
ETCH-085
ETCH-086
ETCH-087
ETCH-088
ETCH-089
ETCH-090
ETCH-091
ETCH-092
ETCH-093
ETCH-094
ETCH-095
ETCH-096
ETCH-097
ETCH-098
ETCH-099
ETCH-100
ETCH-101
ETCH-102
ETCH-103
ETCH-104
ETCH-105
ETCH-106
ETCH-107
ETCH-108
ETCH-109
ETCH-110
ETCH-111
ETCH-112
ETCH-113
ETCH-114
ETCH-115
ETCH-116
ETCH-117
ETCH-118
ETCH-119
ETCH-120
ETCH-121
ETCH-122
ETCH-123
ETCH-124
ETCH-125
ETCH-126
ETCH-127
ETCH-128
ETCH-129
ETCH-130
ETCH-131
ETCH-132
ETCH-133
ETCH-134
ETCH-135
ETCH-136
ETCH-137
ETCH-138
ETCH-139
ETCH-140
ETCH-141
ETCH-142
ETCH-143
ETCH-144
ETCH-145
ETCH-146
ETCH-147
ETCH-148
ETCH-149
ETCH-150
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Scheduled Down
Unscheduled Down
Processing
Idle
Engineering
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
ETCH-026
Minor
Gas flow controller fault
...
ETCH-013
Critical
Gas flow controller fault
...
ETCH-071
Major
Gas flow controller fault
...
ETCH-092
Major
Plasma ignition failure
...
ETCH-136
Critical
Gas flow controller fault
...
ETCH-100
Warning
Endpoint detection error
...
ETCH-098
Critical
Plasma ignition failure
...
ETCH-107
Warning
Endpoint detection error
...
ETCH-010
Warning
Endpoint detection error
...
ETCH-030
Critical
Plasma ignition failure
...
ETCH-068
Major
Gas flow controller fault
...
ETCH-094
Major
Plasma ignition failure
...
ETCH-029
Warning
Plasma ignition failure
...
ETCH-081
Warning
Plasma ignition failure
...
ETCH-030
Major
Endpoint detection error
...
ETCH-102
Major
Plasma ignition failure
...
ETCH-129
Major
Gas flow controller fault
...
ETCH-027
Critical
Plasma ignition failure
...
ETCH-077
Major
Endpoint detection error
...
ETCH-136
Minor
Endpoint detection error
...
ETCH-132
Critical
Gas flow controller fault
...
ETCH-010
Minor
Endpoint detection error
...
ETCH-082
Critical
Plasma ignition failure
...
ETCH-145
Warning
Gas flow controller fault
...
ETCH-003
Major
Gas flow controller fault
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
ETCH-128
ProcessingStarted
7
...
ETCH-096
ProcessingCompleted
82
...
ETCH-121
ProcessingStarted
33
...
ETCH-035
ProcessingStarted
0
...
ETCH-076
MaterialUnloaded
6
...
ETCH-041
ProcessingStarted
92
...
ETCH-078
ProcessingStarted
26
...
ETCH-078
ProcessingCompleted
93
...
ETCH-071
ProcessingCompleted
0
...
ETCH-027
ControlStateChanged
83
...
ETCH-046
MaterialUnloaded
13
...
ETCH-057
ControlStateChanged
38
...
ETCH-009
MaterialUnloaded
11
...
ETCH-080
ControlStateChanged
13
...
ETCH-084
ProcessingStarted
23
...
ETCH-092
MaterialLoaded
2
...
ETCH-065
ProcessingStarted
37
...
ETCH-092
MaterialLoaded
82
...
ETCH-014
MaterialLoaded
16
...
ETCH-055
MaterialLoaded
83
...
ETCH-124
ProcessingStarted
19
...
ETCH-074
MaterialUnloaded
30
...
ETCH-027
ControlStateChanged
2
...
ETCH-012
ProcessingStarted
10
...
ETCH-040
MaterialLoaded
1
...
ETCH-058
MaterialLoaded
9
...
ETCH-022
MaterialLoaded
72
...
ETCH-074
MaterialLoaded
5
...
ETCH-006
ControlStateChanged
29
...
ETCH-142
ControlStateChanged
79
...
ETCH-032
ProcessingStarted
3
...
ETCH-112
ProcessingCompleted
37
...
ETCH-022
MaterialUnloaded
3
...
ETCH-036
ControlStateChanged
97
...
ETCH-098
ProcessingStarted
21
...
ETCH-053
ProcessingStarted
18
...
ETCH-004
ControlStateChanged
18
...
ETCH-006
MaterialLoaded
22
...
ETCH-053
ControlStateChanged
25
...
ETCH-004
MaterialLoaded
18
...
ETCH-069
ProcessingCompleted
80
...
ETCH-035
MaterialLoaded
88
...
ETCH-067
ProcessingStarted
14
...
ETCH-083
ControlStateChanged
9
...
ETCH-025
MaterialUnloaded
36
...
ETCH-010
ProcessingStarted
15
...
ETCH-097
ProcessingStarted
38
...
ETCH-079
MaterialUnloaded
5
...
ETCH-053
ProcessingCompleted
17
...
ETCH-144
MaterialLoaded
27
...