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Diffusion Dashboard
Real-time status, alarms, and events for all Diffusion tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIFF-001
DIFF-002
DIFF-003
DIFF-004
DIFF-005
DIFF-006
DIFF-007
DIFF-008
DIFF-009
DIFF-010
DIFF-011
DIFF-012
DIFF-013
DIFF-014
DIFF-015
DIFF-016
DIFF-017
DIFF-018
DIFF-019
DIFF-020
DIFF-021
DIFF-022
DIFF-023
DIFF-024
DIFF-025
DIFF-026
DIFF-027
DIFF-028
DIFF-029
DIFF-030
DIFF-031
DIFF-032
DIFF-033
DIFF-034
DIFF-035
DIFF-036
DIFF-037
DIFF-038
DIFF-039
DIFF-040
DIFF-041
DIFF-042
DIFF-043
DIFF-044
DIFF-045
DIFF-046
DIFF-047
DIFF-048
DIFF-049
DIFF-050
DIFF-051
DIFF-052
DIFF-053
DIFF-054
DIFF-055
DIFF-056
DIFF-057
DIFF-058
DIFF-059
DIFF-060
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIFF-011
Critical
Quartz tube contamination
...
DIFF-036
Critical
Quartz tube contamination
...
DIFF-003
Critical
Gas leak detected in furnace
...
DIFF-002
Warning
Quartz tube contamination
...
DIFF-026
Warning
Temperature overshoot
...
DIFF-005
Warning
Quartz tube contamination
...
DIFF-055
Critical
Gas leak detected in furnace
...
DIFF-006
Critical
Temperature overshoot
...
DIFF-030
Major
Quartz tube contamination
...
DIFF-048
Minor
Gas leak detected in furnace
...
DIFF-039
Major
Gas leak detected in furnace
...
DIFF-011
Warning
Temperature overshoot
...
DIFF-050
Warning
Quartz tube contamination
...
DIFF-017
Minor
Temperature overshoot
...
DIFF-056
Critical
Temperature overshoot
...
DIFF-038
Warning
Temperature overshoot
...
DIFF-010
Warning
Gas leak detected in furnace
...
DIFF-017
Major
Temperature overshoot
...
DIFF-045
Warning
Quartz tube contamination
...
DIFF-044
Critical
Temperature overshoot
...
DIFF-008
Minor
Quartz tube contamination
...
DIFF-011
Major
Gas leak detected in furnace
...
DIFF-047
Minor
Gas leak detected in furnace
...
DIFF-010
Warning
Temperature overshoot
...
DIFF-008
Critical
Quartz tube contamination
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIFF-017
ProcessingCompleted
33
...
DIFF-003
MaterialUnloaded
16
...
DIFF-060
ControlStateChanged
0
...
DIFF-011
ControlStateChanged
0
...
DIFF-033
ControlStateChanged
13
...
DIFF-039
MaterialLoaded
23
...
DIFF-006
MaterialLoaded
5
...
DIFF-029
ProcessingStarted
26
...
DIFF-048
ProcessingCompleted
37
...
DIFF-028
ProcessingStarted
35
...
DIFF-029
ProcessingCompleted
16
...
DIFF-038
MaterialLoaded
15
...
DIFF-045
MaterialUnloaded
8
...
DIFF-022
ProcessingCompleted
8
...
DIFF-018
ProcessingCompleted
4
...
DIFF-021
ControlStateChanged
29
...
DIFF-003
ControlStateChanged
11
...
DIFF-008
MaterialUnloaded
9
...
DIFF-011
MaterialLoaded
29
...
DIFF-055
MaterialLoaded
37
...
DIFF-041
ControlStateChanged
95
...
DIFF-022
ProcessingStarted
27
...
DIFF-010
ProcessingStarted
37
...
DIFF-030
ProcessingCompleted
1
...
DIFF-050
MaterialLoaded
28
...
DIFF-039
ControlStateChanged
29
...
DIFF-012
ProcessingCompleted
17
...
DIFF-049
MaterialUnloaded
13
...
DIFF-015
ControlStateChanged
17
...
DIFF-045
ProcessingCompleted
32
...
DIFF-054
ControlStateChanged
22
...
DIFF-058
ControlStateChanged
10
...
DIFF-013
ControlStateChanged
14
...
DIFF-032
ControlStateChanged
27
...
DIFF-054
MaterialUnloaded
25
...
DIFF-031
MaterialLoaded
90
...
DIFF-032
ProcessingCompleted
2
...
DIFF-056
MaterialLoaded
10
...
DIFF-046
ProcessingStarted
91
...
DIFF-040
ProcessingCompleted
4
...
DIFF-052
MaterialLoaded
29
...
DIFF-042
MaterialLoaded
4
...
DIFF-038
ProcessingCompleted
14
...
DIFF-011
MaterialUnloaded
6
...
DIFF-035
ProcessingCompleted
2
...
DIFF-013
MaterialUnloaded
18
...
DIFF-009
ControlStateChanged
78
...
DIFF-015
MaterialUnloaded
32
...
DIFF-003
ProcessingCompleted
26
...
DIFF-020
ProcessingCompleted
84
...