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Diffusion Dashboard
Real-time status, alarms, and events for all Diffusion tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIFF-001
DIFF-002
DIFF-003
DIFF-004
DIFF-005
DIFF-006
DIFF-007
DIFF-008
DIFF-009
DIFF-010
DIFF-011
DIFF-012
DIFF-013
DIFF-014
DIFF-015
DIFF-016
DIFF-017
DIFF-018
DIFF-019
DIFF-020
DIFF-021
DIFF-022
DIFF-023
DIFF-024
DIFF-025
DIFF-026
DIFF-027
DIFF-028
DIFF-029
DIFF-030
DIFF-031
DIFF-032
DIFF-033
DIFF-034
DIFF-035
DIFF-036
DIFF-037
DIFF-038
DIFF-039
DIFF-040
DIFF-041
DIFF-042
DIFF-043
DIFF-044
DIFF-045
DIFF-046
DIFF-047
DIFF-048
DIFF-049
DIFF-050
DIFF-051
DIFF-052
DIFF-053
DIFF-054
DIFF-055
DIFF-056
DIFF-057
DIFF-058
DIFF-059
DIFF-060
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIFF-010
Minor
Quartz tube contamination
...
DIFF-028
Critical
Gas leak detected in furnace
...
DIFF-007
Critical
Quartz tube contamination
...
DIFF-011
Major
Temperature overshoot
...
DIFF-015
Minor
Temperature overshoot
...
DIFF-054
Critical
Quartz tube contamination
...
DIFF-024
Critical
Gas leak detected in furnace
...
DIFF-019
Major
Temperature overshoot
...
DIFF-024
Major
Gas leak detected in furnace
...
DIFF-055
Warning
Gas leak detected in furnace
...
DIFF-037
Minor
Temperature overshoot
...
DIFF-007
Minor
Temperature overshoot
...
DIFF-015
Critical
Temperature overshoot
...
DIFF-038
Major
Quartz tube contamination
...
DIFF-023
Warning
Gas leak detected in furnace
...
DIFF-015
Warning
Temperature overshoot
...
DIFF-048
Major
Quartz tube contamination
...
DIFF-006
Critical
Temperature overshoot
...
DIFF-009
Minor
Gas leak detected in furnace
...
DIFF-027
Warning
Temperature overshoot
...
DIFF-060
Minor
Temperature overshoot
...
DIFF-059
Major
Quartz tube contamination
...
DIFF-009
Critical
Quartz tube contamination
...
DIFF-044
Warning
Gas leak detected in furnace
...
DIFF-053
Critical
Gas leak detected in furnace
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIFF-006
ProcessingStarted
10
...
DIFF-056
ProcessingCompleted
19
...
DIFF-024
ProcessingStarted
7
...
DIFF-029
MaterialLoaded
70
...
DIFF-008
ProcessingStarted
24
...
DIFF-043
ControlStateChanged
21
...
DIFF-018
MaterialUnloaded
27
...
DIFF-012
ProcessingCompleted
12
...
DIFF-032
MaterialUnloaded
37
...
DIFF-004
ControlStateChanged
31
...
DIFF-028
MaterialUnloaded
74
...
DIFF-046
MaterialUnloaded
35
...
DIFF-041
MaterialLoaded
8
...
DIFF-031
MaterialUnloaded
0
...
DIFF-022
ProcessingCompleted
92
...
DIFF-054
MaterialUnloaded
37
...
DIFF-010
MaterialLoaded
73
...
DIFF-060
ProcessingCompleted
20
...
DIFF-004
ControlStateChanged
7
...
DIFF-049
ControlStateChanged
7
...
DIFF-018
MaterialLoaded
16
...
DIFF-042
ControlStateChanged
16
...
DIFF-055
ProcessingStarted
38
...
DIFF-059
ProcessingCompleted
29
...
DIFF-006
ProcessingStarted
32
...
DIFF-027
ProcessingCompleted
96
...
DIFF-037
MaterialUnloaded
10
...
DIFF-003
ProcessingCompleted
83
...
DIFF-010
ProcessingStarted
14
...
DIFF-060
ProcessingCompleted
31
...
DIFF-012
MaterialUnloaded
31
...
DIFF-056
ProcessingStarted
93
...
DIFF-045
ControlStateChanged
4
...
DIFF-018
ControlStateChanged
22
...
DIFF-059
ControlStateChanged
2
...
DIFF-015
ProcessingStarted
34
...
DIFF-048
MaterialUnloaded
38
...
DIFF-003
ControlStateChanged
34
...
DIFF-052
MaterialUnloaded
9
...
DIFF-017
ProcessingStarted
4
...
DIFF-021
ProcessingCompleted
30
...
DIFF-034
ProcessingCompleted
0
...
DIFF-026
ProcessingStarted
32
...
DIFF-010
MaterialUnloaded
78
...
DIFF-015
ProcessingStarted
8
...
DIFF-035
ProcessingStarted
36
...
DIFF-010
ControlStateChanged
80
...
DIFF-052
MaterialUnloaded
11
...
DIFF-031
MaterialUnloaded
9
...
DIFF-046
ControlStateChanged
23
...