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Diffusion Dashboard
Real-time status, alarms, and events for all Diffusion tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIFF-001
DIFF-002
DIFF-003
DIFF-004
DIFF-005
DIFF-006
DIFF-007
DIFF-008
DIFF-009
DIFF-010
DIFF-011
DIFF-012
DIFF-013
DIFF-014
DIFF-015
DIFF-016
DIFF-017
DIFF-018
DIFF-019
DIFF-020
DIFF-021
DIFF-022
DIFF-023
DIFF-024
DIFF-025
DIFF-026
DIFF-027
DIFF-028
DIFF-029
DIFF-030
DIFF-031
DIFF-032
DIFF-033
DIFF-034
DIFF-035
DIFF-036
DIFF-037
DIFF-038
DIFF-039
DIFF-040
DIFF-041
DIFF-042
DIFF-043
DIFF-044
DIFF-045
DIFF-046
DIFF-047
DIFF-048
DIFF-049
DIFF-050
DIFF-051
DIFF-052
DIFF-053
DIFF-054
DIFF-055
DIFF-056
DIFF-057
DIFF-058
DIFF-059
DIFF-060
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIFF-025
Warning
Quartz tube contamination
...
DIFF-016
Critical
Gas leak detected in furnace
...
DIFF-042
Critical
Gas leak detected in furnace
...
DIFF-034
Minor
Quartz tube contamination
...
DIFF-020
Warning
Gas leak detected in furnace
...
DIFF-021
Critical
Temperature overshoot
...
DIFF-052
Warning
Temperature overshoot
...
DIFF-002
Critical
Temperature overshoot
...
DIFF-010
Critical
Gas leak detected in furnace
...
DIFF-050
Critical
Temperature overshoot
...
DIFF-024
Major
Quartz tube contamination
...
DIFF-012
Critical
Gas leak detected in furnace
...
DIFF-022
Minor
Quartz tube contamination
...
DIFF-020
Major
Quartz tube contamination
...
DIFF-060
Critical
Gas leak detected in furnace
...
DIFF-041
Major
Gas leak detected in furnace
...
DIFF-058
Warning
Gas leak detected in furnace
...
DIFF-029
Major
Temperature overshoot
...
DIFF-035
Major
Gas leak detected in furnace
...
DIFF-029
Critical
Temperature overshoot
...
DIFF-023
Critical
Quartz tube contamination
...
DIFF-004
Warning
Temperature overshoot
...
DIFF-038
Minor
Quartz tube contamination
...
DIFF-013
Warning
Quartz tube contamination
...
DIFF-038
Warning
Gas leak detected in furnace
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIFF-005
ProcessingCompleted
16
...
DIFF-024
MaterialUnloaded
1
...
DIFF-037
ProcessingStarted
36
...
DIFF-034
MaterialLoaded
78
...
DIFF-006
MaterialLoaded
19
...
DIFF-016
ControlStateChanged
20
...
DIFF-033
MaterialLoaded
29
...
DIFF-020
ProcessingStarted
34
...
DIFF-018
ProcessingCompleted
29
...
DIFF-041
ProcessingCompleted
4
...
DIFF-042
ProcessingCompleted
13
...
DIFF-003
MaterialUnloaded
22
...
DIFF-060
ProcessingCompleted
36
...
DIFF-019
MaterialLoaded
25
...
DIFF-012
ControlStateChanged
12
...
DIFF-005
ControlStateChanged
91
...
DIFF-013
ProcessingCompleted
36
...
DIFF-057
MaterialLoaded
85
...
DIFF-027
MaterialUnloaded
9
...
DIFF-048
ProcessingStarted
12
...
DIFF-005
MaterialLoaded
33
...
DIFF-024
MaterialUnloaded
85
...
DIFF-049
MaterialLoaded
27
...
DIFF-011
MaterialLoaded
25
...
DIFF-057
ProcessingCompleted
19
...
DIFF-049
ControlStateChanged
31
...
DIFF-054
ProcessingCompleted
29
...
DIFF-035
ProcessingCompleted
6
...
DIFF-041
ProcessingStarted
2
...
DIFF-019
ProcessingCompleted
6
...
DIFF-025
MaterialLoaded
14
...
DIFF-044
ProcessingStarted
28
...
DIFF-023
ProcessingStarted
9
...
DIFF-008
ProcessingCompleted
11
...
DIFF-013
ProcessingStarted
8
...
DIFF-008
ControlStateChanged
86
...
DIFF-028
MaterialLoaded
9
...
DIFF-053
ControlStateChanged
81
...
DIFF-018
ProcessingCompleted
5
...
DIFF-030
ProcessingStarted
25
...
DIFF-037
MaterialLoaded
4
...
DIFF-013
MaterialUnloaded
19
...
DIFF-027
ProcessingCompleted
38
...
DIFF-028
ProcessingCompleted
31
...
DIFF-060
MaterialLoaded
21
...
DIFF-055
MaterialUnloaded
4
...
DIFF-012
ControlStateChanged
86
...
DIFF-048
ProcessingStarted
37
...
DIFF-027
MaterialLoaded
1
...
DIFF-022
ProcessingStarted
14
...