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Diffusion Dashboard
Real-time status, alarms, and events for all Diffusion tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIFF-001
DIFF-002
DIFF-003
DIFF-004
DIFF-005
DIFF-006
DIFF-007
DIFF-008
DIFF-009
DIFF-010
DIFF-011
DIFF-012
DIFF-013
DIFF-014
DIFF-015
DIFF-016
DIFF-017
DIFF-018
DIFF-019
DIFF-020
DIFF-021
DIFF-022
DIFF-023
DIFF-024
DIFF-025
DIFF-026
DIFF-027
DIFF-028
DIFF-029
DIFF-030
DIFF-031
DIFF-032
DIFF-033
DIFF-034
DIFF-035
DIFF-036
DIFF-037
DIFF-038
DIFF-039
DIFF-040
DIFF-041
DIFF-042
DIFF-043
DIFF-044
DIFF-045
DIFF-046
DIFF-047
DIFF-048
DIFF-049
DIFF-050
DIFF-051
DIFF-052
DIFF-053
DIFF-054
DIFF-055
DIFF-056
DIFF-057
DIFF-058
DIFF-059
DIFF-060
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIFF-027
Warning
Temperature overshoot
...
DIFF-003
Critical
Gas leak detected in furnace
...
DIFF-035
Major
Gas leak detected in furnace
...
DIFF-030
Warning
Temperature overshoot
...
DIFF-026
Major
Temperature overshoot
...
DIFF-045
Critical
Temperature overshoot
...
DIFF-057
Critical
Quartz tube contamination
...
DIFF-022
Minor
Temperature overshoot
...
DIFF-032
Minor
Gas leak detected in furnace
...
DIFF-022
Warning
Gas leak detected in furnace
...
DIFF-006
Major
Gas leak detected in furnace
...
DIFF-006
Major
Quartz tube contamination
...
DIFF-035
Critical
Gas leak detected in furnace
...
DIFF-005
Critical
Quartz tube contamination
...
DIFF-030
Warning
Gas leak detected in furnace
...
DIFF-013
Major
Quartz tube contamination
...
DIFF-054
Major
Temperature overshoot
...
DIFF-013
Critical
Quartz tube contamination
...
DIFF-001
Warning
Temperature overshoot
...
DIFF-036
Critical
Gas leak detected in furnace
...
DIFF-015
Warning
Gas leak detected in furnace
...
DIFF-028
Minor
Temperature overshoot
...
DIFF-040
Critical
Temperature overshoot
...
DIFF-056
Critical
Temperature overshoot
...
DIFF-009
Warning
Quartz tube contamination
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIFF-038
ControlStateChanged
98
...
DIFF-027
ControlStateChanged
32
...
DIFF-038
ProcessingStarted
17
...
DIFF-044
MaterialLoaded
8
...
DIFF-043
ProcessingStarted
88
...
DIFF-015
MaterialLoaded
12
...
DIFF-034
MaterialLoaded
38
...
DIFF-011
MaterialLoaded
25
...
DIFF-016
ControlStateChanged
26
...
DIFF-002
ControlStateChanged
90
...
DIFF-047
ControlStateChanged
30
...
DIFF-035
ProcessingStarted
88
...
DIFF-022
MaterialLoaded
23
...
DIFF-026
ProcessingStarted
17
...
DIFF-009
MaterialUnloaded
39
...
DIFF-010
MaterialUnloaded
35
...
DIFF-029
ControlStateChanged
13
...
DIFF-022
ControlStateChanged
16
...
DIFF-002
MaterialUnloaded
28
...
DIFF-044
ControlStateChanged
39
...
DIFF-054
ProcessingStarted
29
...
DIFF-049
ControlStateChanged
33
...
DIFF-026
MaterialUnloaded
73
...
DIFF-058
ProcessingStarted
97
...
DIFF-012
ProcessingStarted
22
...
DIFF-004
MaterialLoaded
81
...
DIFF-049
MaterialUnloaded
16
...
DIFF-035
ProcessingCompleted
30
...
DIFF-005
ProcessingStarted
93
...
DIFF-056
MaterialLoaded
33
...
DIFF-056
MaterialLoaded
18
...
DIFF-002
MaterialUnloaded
89
...
DIFF-015
ControlStateChanged
12
...
DIFF-042
ProcessingCompleted
38
...
DIFF-060
ProcessingCompleted
29
...
DIFF-031
MaterialLoaded
12
...
DIFF-044
ControlStateChanged
78
...
DIFF-001
ControlStateChanged
27
...
DIFF-040
MaterialUnloaded
33
...
DIFF-003
ProcessingStarted
94
...
DIFF-028
MaterialLoaded
24
...
DIFF-012
ControlStateChanged
36
...
DIFF-005
ProcessingCompleted
19
...
DIFF-037
ProcessingStarted
24
...
DIFF-006
ProcessingCompleted
4
...
DIFF-028
MaterialLoaded
22
...
DIFF-009
ControlStateChanged
34
...
DIFF-011
ControlStateChanged
3
...
DIFF-037
MaterialUnloaded
16
...
DIFF-020
MaterialUnloaded
80
...