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Diffusion Dashboard
Real-time status, alarms, and events for all Diffusion tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIFF-001
DIFF-002
DIFF-003
DIFF-004
DIFF-005
DIFF-006
DIFF-007
DIFF-008
DIFF-009
DIFF-010
DIFF-011
DIFF-012
DIFF-013
DIFF-014
DIFF-015
DIFF-016
DIFF-017
DIFF-018
DIFF-019
DIFF-020
DIFF-021
DIFF-022
DIFF-023
DIFF-024
DIFF-025
DIFF-026
DIFF-027
DIFF-028
DIFF-029
DIFF-030
DIFF-031
DIFF-032
DIFF-033
DIFF-034
DIFF-035
DIFF-036
DIFF-037
DIFF-038
DIFF-039
DIFF-040
DIFF-041
DIFF-042
DIFF-043
DIFF-044
DIFF-045
DIFF-046
DIFF-047
DIFF-048
DIFF-049
DIFF-050
DIFF-051
DIFF-052
DIFF-053
DIFF-054
DIFF-055
DIFF-056
DIFF-057
DIFF-058
DIFF-059
DIFF-060
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIFF-011
Critical
Quartz tube contamination
...
DIFF-045
Warning
Quartz tube contamination
...
DIFF-053
Critical
Gas leak detected in furnace
...
DIFF-047
Major
Temperature overshoot
...
DIFF-050
Warning
Quartz tube contamination
...
DIFF-033
Major
Quartz tube contamination
...
DIFF-036
Minor
Quartz tube contamination
...
DIFF-021
Critical
Gas leak detected in furnace
...
DIFF-013
Critical
Temperature overshoot
...
DIFF-034
Critical
Temperature overshoot
...
DIFF-058
Warning
Temperature overshoot
...
DIFF-044
Major
Gas leak detected in furnace
...
DIFF-032
Critical
Quartz tube contamination
...
DIFF-037
Major
Quartz tube contamination
...
DIFF-017
Critical
Temperature overshoot
...
DIFF-012
Warning
Temperature overshoot
...
DIFF-037
Warning
Quartz tube contamination
...
DIFF-029
Critical
Gas leak detected in furnace
...
DIFF-003
Major
Gas leak detected in furnace
...
DIFF-040
Major
Gas leak detected in furnace
...
DIFF-020
Critical
Quartz tube contamination
...
DIFF-027
Warning
Gas leak detected in furnace
...
DIFF-008
Critical
Temperature overshoot
...
DIFF-014
Critical
Temperature overshoot
...
DIFF-048
Critical
Quartz tube contamination
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIFF-009
ProcessingCompleted
30
...
DIFF-005
MaterialUnloaded
18
...
DIFF-042
ControlStateChanged
27
...
DIFF-059
ProcessingStarted
22
...
DIFF-040
ControlStateChanged
92
...
DIFF-040
MaterialUnloaded
37
...
DIFF-053
MaterialLoaded
35
...
DIFF-055
MaterialUnloaded
29
...
DIFF-020
MaterialUnloaded
11
...
DIFF-047
ProcessingCompleted
71
...
DIFF-041
ProcessingStarted
10
...
DIFF-051
MaterialLoaded
17
...
DIFF-036
MaterialLoaded
12
...
DIFF-040
MaterialUnloaded
75
...
DIFF-031
ProcessingCompleted
3
...
DIFF-026
MaterialLoaded
3
...
DIFF-023
ProcessingStarted
81
...
DIFF-036
ProcessingCompleted
22
...
DIFF-045
ProcessingCompleted
9
...
DIFF-021
ProcessingCompleted
10
...
DIFF-020
MaterialLoaded
7
...
DIFF-024
ProcessingStarted
15
...
DIFF-048
ControlStateChanged
26
...
DIFF-025
MaterialLoaded
0
...
DIFF-011
ProcessingStarted
29
...
DIFF-001
ControlStateChanged
38
...
DIFF-010
ProcessingStarted
38
...
DIFF-048
ControlStateChanged
23
...
DIFF-030
ProcessingStarted
0
...
DIFF-058
MaterialLoaded
28
...
DIFF-046
ControlStateChanged
2
...
DIFF-014
ProcessingStarted
10
...
DIFF-053
ProcessingCompleted
12
...
DIFF-042
ProcessingCompleted
19
...
DIFF-045
ProcessingCompleted
21
...
DIFF-036
MaterialUnloaded
37
...
DIFF-032
ControlStateChanged
37
...
DIFF-058
ProcessingStarted
31
...
DIFF-055
ProcessingCompleted
0
...
DIFF-020
ControlStateChanged
36
...
DIFF-018
ProcessingStarted
9
...
DIFF-030
ControlStateChanged
10
...
DIFF-034
ControlStateChanged
23
...
DIFF-048
ControlStateChanged
38
...
DIFF-022
MaterialUnloaded
35
...
DIFF-020
ProcessingCompleted
5
...
DIFF-049
MaterialLoaded
29
...
DIFF-048
ControlStateChanged
4
...
DIFF-057
ControlStateChanged
92
...
DIFF-015
MaterialLoaded
32
...