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Diffusion Dashboard
Real-time status, alarms, and events for all Diffusion tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIFF-001
DIFF-002
DIFF-003
DIFF-004
DIFF-005
DIFF-006
DIFF-007
DIFF-008
DIFF-009
DIFF-010
DIFF-011
DIFF-012
DIFF-013
DIFF-014
DIFF-015
DIFF-016
DIFF-017
DIFF-018
DIFF-019
DIFF-020
DIFF-021
DIFF-022
DIFF-023
DIFF-024
DIFF-025
DIFF-026
DIFF-027
DIFF-028
DIFF-029
DIFF-030
DIFF-031
DIFF-032
DIFF-033
DIFF-034
DIFF-035
DIFF-036
DIFF-037
DIFF-038
DIFF-039
DIFF-040
DIFF-041
DIFF-042
DIFF-043
DIFF-044
DIFF-045
DIFF-046
DIFF-047
DIFF-048
DIFF-049
DIFF-050
DIFF-051
DIFF-052
DIFF-053
DIFF-054
DIFF-055
DIFF-056
DIFF-057
DIFF-058
DIFF-059
DIFF-060
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIFF-002
Minor
Temperature overshoot
...
DIFF-021
Major
Temperature overshoot
...
DIFF-047
Critical
Temperature overshoot
...
DIFF-009
Critical
Quartz tube contamination
...
DIFF-056
Major
Temperature overshoot
...
DIFF-015
Major
Gas leak detected in furnace
...
DIFF-045
Critical
Temperature overshoot
...
DIFF-015
Major
Temperature overshoot
...
DIFF-006
Major
Quartz tube contamination
...
DIFF-036
Minor
Gas leak detected in furnace
...
DIFF-018
Major
Quartz tube contamination
...
DIFF-050
Minor
Temperature overshoot
...
DIFF-035
Critical
Quartz tube contamination
...
DIFF-017
Warning
Gas leak detected in furnace
...
DIFF-007
Critical
Gas leak detected in furnace
...
DIFF-040
Major
Quartz tube contamination
...
DIFF-057
Minor
Quartz tube contamination
...
DIFF-016
Major
Quartz tube contamination
...
DIFF-051
Warning
Gas leak detected in furnace
...
DIFF-009
Major
Gas leak detected in furnace
...
DIFF-051
Warning
Quartz tube contamination
...
DIFF-007
Critical
Temperature overshoot
...
DIFF-043
Minor
Quartz tube contamination
...
DIFF-055
Major
Gas leak detected in furnace
...
DIFF-023
Critical
Quartz tube contamination
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIFF-024
ProcessingCompleted
11
...
DIFF-041
ProcessingCompleted
8
...
DIFF-008
MaterialUnloaded
16
...
DIFF-050
ControlStateChanged
12
...
DIFF-011
ControlStateChanged
31
...
DIFF-050
ProcessingCompleted
8
...
DIFF-054
ControlStateChanged
6
...
DIFF-037
MaterialLoaded
18
...
DIFF-050
ControlStateChanged
37
...
DIFF-035
ProcessingCompleted
26
...
DIFF-011
ProcessingStarted
14
...
DIFF-040
ControlStateChanged
93
...
DIFF-012
ControlStateChanged
28
...
DIFF-057
ProcessingStarted
31
...
DIFF-039
ProcessingStarted
11
...
DIFF-055
MaterialUnloaded
39
...
DIFF-057
MaterialUnloaded
32
...
DIFF-044
MaterialUnloaded
77
...
DIFF-044
ProcessingCompleted
19
...
DIFF-016
MaterialLoaded
37
...
DIFF-043
MaterialUnloaded
22
...
DIFF-056
MaterialUnloaded
32
...
DIFF-021
ControlStateChanged
30
...
DIFF-018
ControlStateChanged
18
...
DIFF-043
ProcessingCompleted
20
...
DIFF-057
ControlStateChanged
5
...
DIFF-033
ProcessingStarted
78
...
DIFF-006
ProcessingStarted
13
...
DIFF-050
MaterialUnloaded
28
...
DIFF-055
MaterialLoaded
16
...
DIFF-039
MaterialUnloaded
87
...
DIFF-035
MaterialLoaded
11
...
DIFF-039
ProcessingStarted
23
...
DIFF-059
MaterialUnloaded
3
...
DIFF-055
MaterialLoaded
3
...
DIFF-058
MaterialLoaded
72
...
DIFF-059
ProcessingStarted
0
...
DIFF-011
ProcessingCompleted
1
...
DIFF-045
ControlStateChanged
32
...
DIFF-036
MaterialUnloaded
77
...
DIFF-055
ControlStateChanged
86
...
DIFF-042
ProcessingCompleted
23
...
DIFF-040
ControlStateChanged
97
...
DIFF-049
ProcessingCompleted
1
...
DIFF-060
ControlStateChanged
20
...
DIFF-048
ControlStateChanged
80
...
DIFF-021
MaterialLoaded
37
...
DIFF-051
MaterialLoaded
32
...
DIFF-050
MaterialLoaded
75
...
DIFF-037
MaterialUnloaded
30
...