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Diffusion Dashboard
Real-time status, alarms, and events for all Diffusion tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIFF-001
DIFF-002
DIFF-003
DIFF-004
DIFF-005
DIFF-006
DIFF-007
DIFF-008
DIFF-009
DIFF-010
DIFF-011
DIFF-012
DIFF-013
DIFF-014
DIFF-015
DIFF-016
DIFF-017
DIFF-018
DIFF-019
DIFF-020
DIFF-021
DIFF-022
DIFF-023
DIFF-024
DIFF-025
DIFF-026
DIFF-027
DIFF-028
DIFF-029
DIFF-030
DIFF-031
DIFF-032
DIFF-033
DIFF-034
DIFF-035
DIFF-036
DIFF-037
DIFF-038
DIFF-039
DIFF-040
DIFF-041
DIFF-042
DIFF-043
DIFF-044
DIFF-045
DIFF-046
DIFF-047
DIFF-048
DIFF-049
DIFF-050
DIFF-051
DIFF-052
DIFF-053
DIFF-054
DIFF-055
DIFF-056
DIFF-057
DIFF-058
DIFF-059
DIFF-060
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIFF-039
Critical
Gas leak detected in furnace
...
DIFF-011
Critical
Gas leak detected in furnace
...
DIFF-038
Critical
Temperature overshoot
...
DIFF-056
Critical
Gas leak detected in furnace
...
DIFF-008
Warning
Gas leak detected in furnace
...
DIFF-004
Major
Gas leak detected in furnace
...
DIFF-054
Minor
Temperature overshoot
...
DIFF-005
Minor
Quartz tube contamination
...
DIFF-051
Critical
Quartz tube contamination
...
DIFF-002
Major
Gas leak detected in furnace
...
DIFF-007
Warning
Temperature overshoot
...
DIFF-035
Major
Quartz tube contamination
...
DIFF-021
Major
Quartz tube contamination
...
DIFF-026
Critical
Temperature overshoot
...
DIFF-044
Warning
Temperature overshoot
...
DIFF-041
Warning
Temperature overshoot
...
DIFF-009
Critical
Quartz tube contamination
...
DIFF-055
Warning
Temperature overshoot
...
DIFF-001
Critical
Temperature overshoot
...
DIFF-046
Critical
Quartz tube contamination
...
DIFF-003
Critical
Temperature overshoot
...
DIFF-043
Major
Quartz tube contamination
...
DIFF-026
Critical
Temperature overshoot
...
DIFF-032
Critical
Quartz tube contamination
...
DIFF-047
Minor
Gas leak detected in furnace
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIFF-025
MaterialUnloaded
5
...
DIFF-035
ControlStateChanged
29
...
DIFF-006
MaterialUnloaded
29
...
DIFF-039
MaterialLoaded
22
...
DIFF-048
MaterialUnloaded
27
...
DIFF-051
ControlStateChanged
35
...
DIFF-016
ControlStateChanged
99
...
DIFF-045
MaterialLoaded
3
...
DIFF-022
ProcessingCompleted
36
...
DIFF-046
ProcessingStarted
22
...
DIFF-032
ControlStateChanged
29
...
DIFF-028
ProcessingCompleted
2
...
DIFF-045
ControlStateChanged
19
...
DIFF-057
ControlStateChanged
19
...
DIFF-042
MaterialUnloaded
33
...
DIFF-057
MaterialUnloaded
7
...
DIFF-036
ProcessingStarted
39
...
DIFF-029
ProcessingStarted
24
...
DIFF-039
ProcessingCompleted
15
...
DIFF-032
MaterialUnloaded
8
...
DIFF-030
MaterialUnloaded
0
...
DIFF-046
MaterialUnloaded
37
...
DIFF-040
ProcessingStarted
39
...
DIFF-042
MaterialLoaded
22
...
DIFF-060
MaterialLoaded
36
...
DIFF-003
MaterialLoaded
37
...
DIFF-028
MaterialLoaded
86
...
DIFF-024
ControlStateChanged
4
...
DIFF-011
ControlStateChanged
0
...
DIFF-002
MaterialLoaded
20
...
DIFF-029
MaterialLoaded
77
...
DIFF-025
MaterialLoaded
3
...
DIFF-018
ProcessingStarted
6
...
DIFF-039
MaterialUnloaded
17
...
DIFF-004
MaterialUnloaded
13
...
DIFF-006
MaterialUnloaded
21
...
DIFF-041
MaterialLoaded
32
...
DIFF-010
MaterialUnloaded
28
...
DIFF-037
ProcessingStarted
3
...
DIFF-037
ProcessingCompleted
85
...
DIFF-023
MaterialLoaded
29
...
DIFF-040
ProcessingCompleted
29
...
DIFF-043
MaterialUnloaded
29
...
DIFF-044
ProcessingStarted
94
...
DIFF-025
ControlStateChanged
11
...
DIFF-049
MaterialLoaded
28
...
DIFF-009
MaterialUnloaded
71
...
DIFF-056
MaterialUnloaded
5
...
DIFF-035
ProcessingStarted
6
...
DIFF-009
ControlStateChanged
33
...