FabView
Semiconductor Fab
Dashboard
Litho
Etch
Thin Films
Metrology
Implant
Diffusion
Dielectrics
CMP
Query Studio
System Admin
Change Theme
Toggle Sidebar
FabView
...
Diffusion Dashboard
Real-time status, alarms, and events for all Diffusion tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIFF-001
DIFF-002
DIFF-003
DIFF-004
DIFF-005
DIFF-006
DIFF-007
DIFF-008
DIFF-009
DIFF-010
DIFF-011
DIFF-012
DIFF-013
DIFF-014
DIFF-015
DIFF-016
DIFF-017
DIFF-018
DIFF-019
DIFF-020
DIFF-021
DIFF-022
DIFF-023
DIFF-024
DIFF-025
DIFF-026
DIFF-027
DIFF-028
DIFF-029
DIFF-030
DIFF-031
DIFF-032
DIFF-033
DIFF-034
DIFF-035
DIFF-036
DIFF-037
DIFF-038
DIFF-039
DIFF-040
DIFF-041
DIFF-042
DIFF-043
DIFF-044
DIFF-045
DIFF-046
DIFF-047
DIFF-048
DIFF-049
DIFF-050
DIFF-051
DIFF-052
DIFF-053
DIFF-054
DIFF-055
DIFF-056
DIFF-057
DIFF-058
DIFF-059
DIFF-060
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIFF-002
Major
Temperature overshoot
...
DIFF-041
Warning
Quartz tube contamination
...
DIFF-055
Major
Quartz tube contamination
...
DIFF-050
Major
Temperature overshoot
...
DIFF-018
Warning
Gas leak detected in furnace
...
DIFF-056
Warning
Temperature overshoot
...
DIFF-007
Critical
Temperature overshoot
...
DIFF-001
Critical
Quartz tube contamination
...
DIFF-051
Major
Temperature overshoot
...
DIFF-017
Major
Gas leak detected in furnace
...
DIFF-003
Critical
Temperature overshoot
...
DIFF-058
Critical
Quartz tube contamination
...
DIFF-012
Major
Temperature overshoot
...
DIFF-051
Critical
Quartz tube contamination
...
DIFF-003
Warning
Gas leak detected in furnace
...
DIFF-059
Warning
Quartz tube contamination
...
DIFF-009
Minor
Quartz tube contamination
...
DIFF-038
Major
Gas leak detected in furnace
...
DIFF-032
Major
Quartz tube contamination
...
DIFF-010
Major
Temperature overshoot
...
DIFF-032
Critical
Gas leak detected in furnace
...
DIFF-038
Warning
Gas leak detected in furnace
...
DIFF-055
Major
Gas leak detected in furnace
...
DIFF-045
Major
Gas leak detected in furnace
...
DIFF-017
Critical
Gas leak detected in furnace
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIFF-018
ProcessingStarted
17
...
DIFF-041
MaterialLoaded
25
...
DIFF-050
ProcessingStarted
2
...
DIFF-033
ProcessingStarted
15
...
DIFF-039
ProcessingStarted
11
...
DIFF-006
ProcessingStarted
8
...
DIFF-040
ProcessingCompleted
1
...
DIFF-045
ProcessingCompleted
35
...
DIFF-048
ProcessingStarted
1
...
DIFF-051
MaterialLoaded
99
...
DIFF-060
ProcessingStarted
2
...
DIFF-045
ProcessingStarted
9
...
DIFF-037
ControlStateChanged
79
...
DIFF-026
ProcessingCompleted
78
...
DIFF-047
MaterialUnloaded
30
...
DIFF-012
MaterialLoaded
8
...
DIFF-024
ProcessingCompleted
18
...
DIFF-044
ProcessingStarted
18
...
DIFF-007
MaterialLoaded
32
...
DIFF-034
MaterialUnloaded
6
...
DIFF-011
ControlStateChanged
9
...
DIFF-041
ControlStateChanged
31
...
DIFF-039
ControlStateChanged
15
...
DIFF-060
MaterialUnloaded
26
...
DIFF-013
MaterialLoaded
38
...
DIFF-016
MaterialUnloaded
1
...
DIFF-042
MaterialLoaded
17
...
DIFF-059
ProcessingStarted
35
...
DIFF-004
ControlStateChanged
0
...
DIFF-041
ControlStateChanged
75
...
DIFF-052
ProcessingStarted
4
...
DIFF-011
MaterialUnloaded
39
...
DIFF-053
ProcessingStarted
18
...
DIFF-058
ProcessingCompleted
24
...
DIFF-020
ProcessingCompleted
31
...
DIFF-041
ProcessingCompleted
17
...
DIFF-031
ProcessingStarted
7
...
DIFF-030
ProcessingCompleted
95
...
DIFF-023
MaterialLoaded
14
...
DIFF-002
MaterialLoaded
32
...
DIFF-045
ProcessingCompleted
24
...
DIFF-011
MaterialLoaded
14
...
DIFF-008
MaterialUnloaded
35
...
DIFF-007
ControlStateChanged
1
...
DIFF-049
ControlStateChanged
7
...
DIFF-033
MaterialUnloaded
90
...
DIFF-024
MaterialUnloaded
87
...
DIFF-035
ProcessingCompleted
20
...
DIFF-010
MaterialLoaded
7
...
DIFF-008
MaterialLoaded
4
...