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Litho Dashboard
Real-time status, alarms, and events for all Litho tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
LITH-001
LITH-002
LITH-003
LITH-004
LITH-005
LITH-006
LITH-007
LITH-008
LITH-009
LITH-010
LITH-011
LITH-012
LITH-013
LITH-014
LITH-015
LITH-016
LITH-017
LITH-018
LITH-019
LITH-020
LITH-021
LITH-022
LITH-023
LITH-024
LITH-025
LITH-026
LITH-027
LITH-028
LITH-029
LITH-030
LITH-031
LITH-032
LITH-033
LITH-034
LITH-035
LITH-036
LITH-037
LITH-038
LITH-039
LITH-040
LITH-041
LITH-042
LITH-043
LITH-044
LITH-045
LITH-046
LITH-047
LITH-048
LITH-049
LITH-050
LITH-051
LITH-052
LITH-053
LITH-054
LITH-055
LITH-056
LITH-057
LITH-058
LITH-059
LITH-060
LITH-061
LITH-062
LITH-063
LITH-064
LITH-065
LITH-066
LITH-067
LITH-068
LITH-069
LITH-070
LITH-071
LITH-072
LITH-073
LITH-074
LITH-075
LITH-076
LITH-077
LITH-078
LITH-079
LITH-080
LITH-081
LITH-082
LITH-083
LITH-084
LITH-085
LITH-086
LITH-087
LITH-088
LITH-089
LITH-090
LITH-091
LITH-092
LITH-093
LITH-094
LITH-095
LITH-096
LITH-097
LITH-098
LITH-099
LITH-100
LITH-101
LITH-102
LITH-103
LITH-104
LITH-105
LITH-106
LITH-107
LITH-108
LITH-109
LITH-110
LITH-111
LITH-112
LITH-113
LITH-114
LITH-115
LITH-116
LITH-117
LITH-118
LITH-119
LITH-120
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Scheduled Down
Unscheduled Down
Processing
Idle
Engineering
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
LITH-084
Critical
Exposure lamp intensity low
...
LITH-036
Warning
Wafer chuck vacuum fail
...
LITH-063
Warning
Reticle alignment error
...
LITH-071
Critical
Exposure lamp intensity low
...
LITH-080
Warning
Reticle alignment error
...
LITH-073
Minor
Reticle alignment error
...
LITH-019
Warning
Exposure lamp intensity low
...
LITH-106
Warning
Reticle alignment error
...
LITH-118
Critical
Wafer chuck vacuum fail
...
LITH-009
Warning
Wafer chuck vacuum fail
...
LITH-099
Warning
Exposure lamp intensity low
...
LITH-056
Minor
Exposure lamp intensity low
...
LITH-062
Critical
Exposure lamp intensity low
...
LITH-009
Warning
Exposure lamp intensity low
...
LITH-007
Critical
Wafer chuck vacuum fail
...
LITH-118
Warning
Exposure lamp intensity low
...
LITH-078
Critical
Exposure lamp intensity low
...
LITH-114
Minor
Reticle alignment error
...
LITH-031
Warning
Exposure lamp intensity low
...
LITH-017
Major
Wafer chuck vacuum fail
...
LITH-103
Critical
Exposure lamp intensity low
...
LITH-089
Minor
Exposure lamp intensity low
...
LITH-019
Minor
Reticle alignment error
...
LITH-017
Critical
Exposure lamp intensity low
...
LITH-041
Major
Wafer chuck vacuum fail
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
LITH-047
MaterialUnloaded
9
...
LITH-030
ProcessingCompleted
15
...
LITH-119
ControlStateChanged
99
...
LITH-037
MaterialUnloaded
3
...
LITH-106
MaterialUnloaded
35
...
LITH-027
MaterialLoaded
30
...
LITH-042
MaterialUnloaded
86
...
LITH-111
MaterialLoaded
6
...
LITH-025
ProcessingCompleted
93
...
LITH-020
ProcessingCompleted
6
...
LITH-078
ControlStateChanged
99
...
LITH-060
ProcessingCompleted
1
...
LITH-085
MaterialLoaded
92
...
LITH-020
MaterialUnloaded
20
...
LITH-011
MaterialLoaded
6
...
LITH-069
ProcessingCompleted
19
...
LITH-070
ProcessingCompleted
14
...
LITH-114
MaterialUnloaded
23
...
LITH-101
ControlStateChanged
24
...
LITH-064
ControlStateChanged
23
...
LITH-059
MaterialLoaded
14
...
LITH-118
ControlStateChanged
2
...
LITH-109
ProcessingCompleted
79
...
LITH-115
MaterialUnloaded
70
...
LITH-059
MaterialUnloaded
9
...
LITH-037
ProcessingStarted
32
...
LITH-026
ControlStateChanged
81
...
LITH-014
ControlStateChanged
32
...
LITH-089
ProcessingCompleted
20
...
LITH-053
ControlStateChanged
28
...
LITH-076
MaterialUnloaded
9
...
LITH-039
MaterialUnloaded
15
...
LITH-086
ProcessingCompleted
15
...
LITH-046
MaterialLoaded
19
...
LITH-009
ControlStateChanged
39
...
LITH-005
MaterialUnloaded
87
...
LITH-008
ProcessingCompleted
19
...
LITH-106
ProcessingCompleted
6
...
LITH-101
ProcessingCompleted
24
...
LITH-115
ProcessingStarted
36
...
LITH-080
ControlStateChanged
17
...
LITH-009
MaterialUnloaded
80
...
LITH-052
ControlStateChanged
79
...
LITH-018
MaterialLoaded
34
...
LITH-063
MaterialUnloaded
11
...
LITH-068
ProcessingStarted
18
...
LITH-014
ControlStateChanged
1
...
LITH-028
MaterialLoaded
8
...
LITH-119
MaterialUnloaded
36
...
LITH-040
ProcessingStarted
17
...