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Litho Dashboard
Real-time status, alarms, and events for all Litho tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
LITH-001
LITH-002
LITH-003
LITH-004
LITH-005
LITH-006
LITH-007
LITH-008
LITH-009
LITH-010
LITH-011
LITH-012
LITH-013
LITH-014
LITH-015
LITH-016
LITH-017
LITH-018
LITH-019
LITH-020
LITH-021
LITH-022
LITH-023
LITH-024
LITH-025
LITH-026
LITH-027
LITH-028
LITH-029
LITH-030
LITH-031
LITH-032
LITH-033
LITH-034
LITH-035
LITH-036
LITH-037
LITH-038
LITH-039
LITH-040
LITH-041
LITH-042
LITH-043
LITH-044
LITH-045
LITH-046
LITH-047
LITH-048
LITH-049
LITH-050
LITH-051
LITH-052
LITH-053
LITH-054
LITH-055
LITH-056
LITH-057
LITH-058
LITH-059
LITH-060
LITH-061
LITH-062
LITH-063
LITH-064
LITH-065
LITH-066
LITH-067
LITH-068
LITH-069
LITH-070
LITH-071
LITH-072
LITH-073
LITH-074
LITH-075
LITH-076
LITH-077
LITH-078
LITH-079
LITH-080
LITH-081
LITH-082
LITH-083
LITH-084
LITH-085
LITH-086
LITH-087
LITH-088
LITH-089
LITH-090
LITH-091
LITH-092
LITH-093
LITH-094
LITH-095
LITH-096
LITH-097
LITH-098
LITH-099
LITH-100
LITH-101
LITH-102
LITH-103
LITH-104
LITH-105
LITH-106
LITH-107
LITH-108
LITH-109
LITH-110
LITH-111
LITH-112
LITH-113
LITH-114
LITH-115
LITH-116
LITH-117
LITH-118
LITH-119
LITH-120
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Scheduled Down
Unscheduled Down
Processing
Idle
Engineering
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
LITH-041
Minor
Exposure lamp intensity low
...
LITH-119
Major
Exposure lamp intensity low
...
LITH-016
Minor
Exposure lamp intensity low
...
LITH-101
Major
Wafer chuck vacuum fail
...
LITH-047
Critical
Reticle alignment error
...
LITH-062
Critical
Wafer chuck vacuum fail
...
LITH-005
Major
Exposure lamp intensity low
...
LITH-005
Warning
Exposure lamp intensity low
...
LITH-032
Critical
Reticle alignment error
...
LITH-108
Warning
Reticle alignment error
...
LITH-081
Critical
Reticle alignment error
...
LITH-110
Warning
Exposure lamp intensity low
...
LITH-029
Critical
Exposure lamp intensity low
...
LITH-089
Minor
Reticle alignment error
...
LITH-059
Critical
Reticle alignment error
...
LITH-096
Critical
Wafer chuck vacuum fail
...
LITH-099
Critical
Exposure lamp intensity low
...
LITH-111
Minor
Exposure lamp intensity low
...
LITH-057
Minor
Exposure lamp intensity low
...
LITH-021
Warning
Wafer chuck vacuum fail
...
LITH-099
Minor
Reticle alignment error
...
LITH-008
Major
Wafer chuck vacuum fail
...
LITH-097
Critical
Exposure lamp intensity low
...
LITH-093
Critical
Wafer chuck vacuum fail
...
LITH-116
Warning
Exposure lamp intensity low
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
LITH-087
ControlStateChanged
98
...
LITH-037
MaterialUnloaded
33
...
LITH-004
ProcessingCompleted
15
...
LITH-078
MaterialLoaded
33
...
LITH-018
MaterialUnloaded
5
...
LITH-032
ProcessingStarted
18
...
LITH-036
ProcessingCompleted
31
...
LITH-072
ControlStateChanged
16
...
LITH-070
MaterialLoaded
14
...
LITH-049
ControlStateChanged
14
...
LITH-074
ProcessingCompleted
29
...
LITH-058
ProcessingStarted
12
...
LITH-013
MaterialUnloaded
10
...
LITH-022
ProcessingStarted
9
...
LITH-075
ProcessingStarted
25
...
LITH-067
ControlStateChanged
10
...
LITH-022
ProcessingStarted
17
...
LITH-066
ProcessingCompleted
11
...
LITH-118
MaterialUnloaded
3
...
LITH-120
MaterialLoaded
33
...
LITH-009
ProcessingCompleted
31
...
LITH-070
ProcessingCompleted
23
...
LITH-102
ProcessingStarted
13
...
LITH-117
MaterialLoaded
5
...
LITH-017
MaterialLoaded
0
...
LITH-075
ProcessingStarted
11
...
LITH-010
MaterialUnloaded
3
...
LITH-011
MaterialUnloaded
24
...
LITH-095
ProcessingStarted
26
...
LITH-110
MaterialUnloaded
34
...
LITH-073
MaterialLoaded
95
...
LITH-097
ProcessingStarted
10
...
LITH-085
ControlStateChanged
16
...
LITH-053
MaterialUnloaded
74
...
LITH-045
ProcessingCompleted
16
...
LITH-007
ProcessingStarted
18
...
LITH-045
ProcessingCompleted
11
...
LITH-093
MaterialUnloaded
15
...
LITH-022
MaterialLoaded
10
...
LITH-029
ProcessingCompleted
1
...
LITH-046
ProcessingStarted
12
...
LITH-070
ProcessingStarted
2
...
LITH-096
ProcessingStarted
8
...
LITH-117
ProcessingCompleted
36
...
LITH-035
ProcessingStarted
9
...
LITH-040
ProcessingCompleted
70
...
LITH-047
MaterialUnloaded
27
...
LITH-021
ProcessingCompleted
3
...
LITH-044
MaterialUnloaded
70
...
LITH-083
ControlStateChanged
38
...