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Litho Dashboard
Real-time status, alarms, and events for all Litho tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
LITH-001
LITH-002
LITH-003
LITH-004
LITH-005
LITH-006
LITH-007
LITH-008
LITH-009
LITH-010
LITH-011
LITH-012
LITH-013
LITH-014
LITH-015
LITH-016
LITH-017
LITH-018
LITH-019
LITH-020
LITH-021
LITH-022
LITH-023
LITH-024
LITH-025
LITH-026
LITH-027
LITH-028
LITH-029
LITH-030
LITH-031
LITH-032
LITH-033
LITH-034
LITH-035
LITH-036
LITH-037
LITH-038
LITH-039
LITH-040
LITH-041
LITH-042
LITH-043
LITH-044
LITH-045
LITH-046
LITH-047
LITH-048
LITH-049
LITH-050
LITH-051
LITH-052
LITH-053
LITH-054
LITH-055
LITH-056
LITH-057
LITH-058
LITH-059
LITH-060
LITH-061
LITH-062
LITH-063
LITH-064
LITH-065
LITH-066
LITH-067
LITH-068
LITH-069
LITH-070
LITH-071
LITH-072
LITH-073
LITH-074
LITH-075
LITH-076
LITH-077
LITH-078
LITH-079
LITH-080
LITH-081
LITH-082
LITH-083
LITH-084
LITH-085
LITH-086
LITH-087
LITH-088
LITH-089
LITH-090
LITH-091
LITH-092
LITH-093
LITH-094
LITH-095
LITH-096
LITH-097
LITH-098
LITH-099
LITH-100
LITH-101
LITH-102
LITH-103
LITH-104
LITH-105
LITH-106
LITH-107
LITH-108
LITH-109
LITH-110
LITH-111
LITH-112
LITH-113
LITH-114
LITH-115
LITH-116
LITH-117
LITH-118
LITH-119
LITH-120
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Scheduled Down
Unscheduled Down
Processing
Idle
Engineering
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
LITH-056
Major
Wafer chuck vacuum fail
...
LITH-108
Warning
Reticle alignment error
...
LITH-003
Major
Reticle alignment error
...
LITH-100
Warning
Exposure lamp intensity low
...
LITH-081
Minor
Wafer chuck vacuum fail
...
LITH-039
Minor
Wafer chuck vacuum fail
...
LITH-001
Critical
Exposure lamp intensity low
...
LITH-001
Critical
Exposure lamp intensity low
...
LITH-088
Warning
Exposure lamp intensity low
...
LITH-093
Major
Reticle alignment error
...
LITH-070
Minor
Wafer chuck vacuum fail
...
LITH-043
Warning
Exposure lamp intensity low
...
LITH-112
Major
Wafer chuck vacuum fail
...
LITH-040
Critical
Wafer chuck vacuum fail
...
LITH-013
Critical
Reticle alignment error
...
LITH-077
Critical
Exposure lamp intensity low
...
LITH-043
Major
Reticle alignment error
...
LITH-106
Minor
Exposure lamp intensity low
...
LITH-097
Critical
Exposure lamp intensity low
...
LITH-001
Major
Exposure lamp intensity low
...
LITH-025
Critical
Exposure lamp intensity low
...
LITH-033
Warning
Exposure lamp intensity low
...
LITH-005
Minor
Wafer chuck vacuum fail
...
LITH-112
Critical
Exposure lamp intensity low
...
LITH-010
Warning
Reticle alignment error
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
LITH-056
ProcessingCompleted
28
...
LITH-046
ControlStateChanged
37
...
LITH-067
ControlStateChanged
39
...
LITH-112
ProcessingCompleted
32
...
LITH-109
MaterialUnloaded
77
...
LITH-077
ProcessingCompleted
21
...
LITH-045
MaterialUnloaded
20
...
LITH-112
MaterialLoaded
14
...
LITH-095
MaterialUnloaded
27
...
LITH-086
MaterialUnloaded
22
...
LITH-026
ProcessingStarted
0
...
LITH-088
ProcessingStarted
5
...
LITH-059
ProcessingStarted
39
...
LITH-013
ControlStateChanged
8
...
LITH-038
MaterialUnloaded
36
...
LITH-055
ProcessingCompleted
10
...
LITH-120
MaterialLoaded
21
...
LITH-116
ProcessingStarted
25
...
LITH-064
ProcessingCompleted
24
...
LITH-009
MaterialLoaded
7
...
LITH-118
ControlStateChanged
11
...
LITH-064
ControlStateChanged
22
...
LITH-056
ProcessingCompleted
84
...
LITH-070
MaterialUnloaded
31
...
LITH-051
ControlStateChanged
16
...
LITH-048
MaterialUnloaded
81
...
LITH-023
ControlStateChanged
35
...
LITH-068
ProcessingCompleted
96
...
LITH-074
ProcessingCompleted
4
...
LITH-007
ProcessingStarted
19
...
LITH-094
ProcessingCompleted
23
...
LITH-007
MaterialUnloaded
6
...
LITH-047
ControlStateChanged
32
...
LITH-091
MaterialUnloaded
97
...
LITH-058
ControlStateChanged
13
...
LITH-015
ProcessingCompleted
73
...
LITH-101
ControlStateChanged
91
...
LITH-019
MaterialUnloaded
33
...
LITH-030
MaterialUnloaded
29
...
LITH-086
ProcessingStarted
39
...
LITH-069
MaterialUnloaded
85
...
LITH-027
ProcessingCompleted
39
...
LITH-107
MaterialUnloaded
94
...
LITH-078
MaterialUnloaded
39
...
LITH-010
ProcessingStarted
34
...
LITH-042
MaterialUnloaded
75
...
LITH-002
ProcessingStarted
27
...
LITH-067
ProcessingCompleted
12
...
LITH-117
ProcessingStarted
1
...
LITH-002
ControlStateChanged
14
...