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Dielectrics Dashboard
Real-time status, alarms, and events for all Dielectrics tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIEL-001
DIEL-002
DIEL-003
DIEL-004
DIEL-005
DIEL-006
DIEL-007
DIEL-008
DIEL-009
DIEL-010
DIEL-011
DIEL-012
DIEL-013
DIEL-014
DIEL-015
DIEL-016
DIEL-017
DIEL-018
DIEL-019
DIEL-020
DIEL-021
DIEL-022
DIEL-023
DIEL-024
DIEL-025
DIEL-026
DIEL-027
DIEL-028
DIEL-029
DIEL-030
DIEL-031
DIEL-032
DIEL-033
DIEL-034
DIEL-035
DIEL-036
DIEL-037
DIEL-038
DIEL-039
DIEL-040
DIEL-041
DIEL-042
DIEL-043
DIEL-044
DIEL-045
DIEL-046
DIEL-047
DIEL-048
DIEL-049
DIEL-050
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIEL-006
Critical
Plasma instability
...
DIEL-005
Critical
Film uniformity issue
...
DIEL-028
Warning
Plasma instability
...
DIEL-047
Critical
Film uniformity issue
...
DIEL-013
Major
Plasma instability
...
DIEL-017
Critical
Deposition rate too low
...
DIEL-008
Critical
Film uniformity issue
...
DIEL-029
Major
Plasma instability
...
DIEL-010
Major
Film uniformity issue
...
DIEL-024
Warning
Plasma instability
...
DIEL-017
Minor
Deposition rate too low
...
DIEL-023
Minor
Film uniformity issue
...
DIEL-012
Critical
Film uniformity issue
...
DIEL-011
Major
Deposition rate too low
...
DIEL-023
Critical
Film uniformity issue
...
DIEL-012
Critical
Film uniformity issue
...
DIEL-016
Critical
Deposition rate too low
...
DIEL-026
Warning
Film uniformity issue
...
DIEL-045
Minor
Film uniformity issue
...
DIEL-031
Major
Film uniformity issue
...
DIEL-030
Major
Film uniformity issue
...
DIEL-001
Major
Deposition rate too low
...
DIEL-040
Major
Deposition rate too low
...
DIEL-015
Critical
Deposition rate too low
...
DIEL-037
Major
Film uniformity issue
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIEL-043
MaterialUnloaded
71
...
DIEL-029
ProcessingCompleted
17
...
DIEL-030
MaterialUnloaded
15
...
DIEL-019
ProcessingStarted
10
...
DIEL-015
ProcessingStarted
35
...
DIEL-009
ProcessingCompleted
14
...
DIEL-006
MaterialLoaded
10
...
DIEL-047
ProcessingStarted
39
...
DIEL-022
ProcessingCompleted
32
...
DIEL-011
ControlStateChanged
72
...
DIEL-045
ProcessingStarted
22
...
DIEL-002
ProcessingStarted
4
...
DIEL-019
MaterialUnloaded
14
...
DIEL-041
ProcessingStarted
36
...
DIEL-035
ControlStateChanged
28
...
DIEL-031
ProcessingStarted
34
...
DIEL-033
MaterialLoaded
7
...
DIEL-017
ProcessingStarted
14
...
DIEL-037
MaterialLoaded
5
...
DIEL-040
MaterialLoaded
38
...
DIEL-023
ControlStateChanged
2
...
DIEL-011
ProcessingCompleted
70
...
DIEL-025
ControlStateChanged
19
...
DIEL-032
ControlStateChanged
7
...
DIEL-028
ProcessingCompleted
36
...
DIEL-024
ControlStateChanged
75
...
DIEL-012
ProcessingCompleted
2
...
DIEL-017
ProcessingStarted
2
...
DIEL-023
MaterialUnloaded
20
...
DIEL-004
MaterialUnloaded
39
...
DIEL-020
MaterialUnloaded
4
...
DIEL-004
MaterialUnloaded
21
...
DIEL-023
MaterialLoaded
25
...
DIEL-013
MaterialLoaded
3
...
DIEL-033
MaterialUnloaded
3
...
DIEL-020
MaterialUnloaded
16
...
DIEL-040
MaterialUnloaded
14
...
DIEL-032
ControlStateChanged
33
...
DIEL-043
ProcessingCompleted
82
...
DIEL-044
ControlStateChanged
24
...
DIEL-031
MaterialUnloaded
26
...
DIEL-019
ProcessingStarted
2
...
DIEL-021
MaterialUnloaded
10
...
DIEL-020
MaterialUnloaded
3
...
DIEL-012
MaterialLoaded
12
...
DIEL-039
ProcessingStarted
82
...
DIEL-025
ProcessingStarted
24
...
DIEL-016
MaterialUnloaded
9
...
DIEL-024
MaterialLoaded
31
...
DIEL-017
ControlStateChanged
5
...