FabView
Semiconductor Fab
Dashboard
Litho
Etch
Thin Films
Metrology
Implant
Diffusion
Dielectrics
CMP
Query Studio
System Admin
Change Theme
Toggle Sidebar
FabView
...
Dielectrics Dashboard
Real-time status, alarms, and events for all Dielectrics tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIEL-001
DIEL-002
DIEL-003
DIEL-004
DIEL-005
DIEL-006
DIEL-007
DIEL-008
DIEL-009
DIEL-010
DIEL-011
DIEL-012
DIEL-013
DIEL-014
DIEL-015
DIEL-016
DIEL-017
DIEL-018
DIEL-019
DIEL-020
DIEL-021
DIEL-022
DIEL-023
DIEL-024
DIEL-025
DIEL-026
DIEL-027
DIEL-028
DIEL-029
DIEL-030
DIEL-031
DIEL-032
DIEL-033
DIEL-034
DIEL-035
DIEL-036
DIEL-037
DIEL-038
DIEL-039
DIEL-040
DIEL-041
DIEL-042
DIEL-043
DIEL-044
DIEL-045
DIEL-046
DIEL-047
DIEL-048
DIEL-049
DIEL-050
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIEL-031
Warning
Deposition rate too low
...
DIEL-029
Warning
Plasma instability
...
DIEL-032
Major
Deposition rate too low
...
DIEL-006
Major
Deposition rate too low
...
DIEL-024
Critical
Plasma instability
...
DIEL-020
Critical
Deposition rate too low
...
DIEL-045
Critical
Plasma instability
...
DIEL-013
Critical
Deposition rate too low
...
DIEL-027
Major
Deposition rate too low
...
DIEL-004
Critical
Deposition rate too low
...
DIEL-025
Major
Plasma instability
...
DIEL-048
Warning
Deposition rate too low
...
DIEL-025
Critical
Plasma instability
...
DIEL-007
Critical
Deposition rate too low
...
DIEL-006
Warning
Deposition rate too low
...
DIEL-018
Major
Deposition rate too low
...
DIEL-044
Minor
Film uniformity issue
...
DIEL-031
Warning
Deposition rate too low
...
DIEL-034
Critical
Film uniformity issue
...
DIEL-006
Warning
Plasma instability
...
DIEL-016
Warning
Deposition rate too low
...
DIEL-004
Minor
Film uniformity issue
...
DIEL-026
Critical
Plasma instability
...
DIEL-045
Critical
Plasma instability
...
DIEL-043
Critical
Film uniformity issue
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIEL-002
MaterialLoaded
72
...
DIEL-030
MaterialLoaded
1
...
DIEL-026
MaterialLoaded
4
...
DIEL-027
ControlStateChanged
18
...
DIEL-027
ProcessingCompleted
1
...
DIEL-042
ProcessingStarted
86
...
DIEL-026
MaterialLoaded
19
...
DIEL-042
ProcessingStarted
0
...
DIEL-005
MaterialUnloaded
17
...
DIEL-011
ControlStateChanged
12
...
DIEL-041
ProcessingStarted
10
...
DIEL-021
MaterialUnloaded
74
...
DIEL-037
ProcessingCompleted
27
...
DIEL-038
ControlStateChanged
76
...
DIEL-035
ControlStateChanged
14
...
DIEL-026
ControlStateChanged
86
...
DIEL-020
ProcessingStarted
13
...
DIEL-016
ControlStateChanged
81
...
DIEL-018
ProcessingCompleted
12
...
DIEL-019
MaterialLoaded
84
...
DIEL-027
ProcessingStarted
23
...
DIEL-035
ProcessingStarted
1
...
DIEL-021
MaterialUnloaded
89
...
DIEL-020
ProcessingCompleted
26
...
DIEL-013
MaterialLoaded
3
...
DIEL-049
ControlStateChanged
20
...
DIEL-043
MaterialUnloaded
3
...
DIEL-014
MaterialLoaded
11
...
DIEL-021
MaterialLoaded
99
...
DIEL-009
MaterialUnloaded
16
...
DIEL-015
MaterialUnloaded
10
...
DIEL-009
MaterialUnloaded
18
...
DIEL-008
ControlStateChanged
12
...
DIEL-037
ProcessingCompleted
0
...
DIEL-026
ProcessingStarted
39
...
DIEL-025
ControlStateChanged
98
...
DIEL-016
MaterialLoaded
29
...
DIEL-031
ControlStateChanged
21
...
DIEL-003
MaterialUnloaded
23
...
DIEL-034
ProcessingCompleted
39
...
DIEL-031
ControlStateChanged
77
...
DIEL-009
ControlStateChanged
21
...
DIEL-034
ControlStateChanged
83
...
DIEL-038
ProcessingStarted
24
...
DIEL-018
ProcessingStarted
8
...
DIEL-045
ProcessingStarted
19
...
DIEL-034
ProcessingCompleted
24
...
DIEL-040
ProcessingCompleted
31
...
DIEL-015
ProcessingStarted
75
...
DIEL-042
MaterialUnloaded
38
...