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Dielectrics Dashboard
Real-time status, alarms, and events for all Dielectrics tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIEL-001
DIEL-002
DIEL-003
DIEL-004
DIEL-005
DIEL-006
DIEL-007
DIEL-008
DIEL-009
DIEL-010
DIEL-011
DIEL-012
DIEL-013
DIEL-014
DIEL-015
DIEL-016
DIEL-017
DIEL-018
DIEL-019
DIEL-020
DIEL-021
DIEL-022
DIEL-023
DIEL-024
DIEL-025
DIEL-026
DIEL-027
DIEL-028
DIEL-029
DIEL-030
DIEL-031
DIEL-032
DIEL-033
DIEL-034
DIEL-035
DIEL-036
DIEL-037
DIEL-038
DIEL-039
DIEL-040
DIEL-041
DIEL-042
DIEL-043
DIEL-044
DIEL-045
DIEL-046
DIEL-047
DIEL-048
DIEL-049
DIEL-050
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIEL-021
Major
Deposition rate too low
...
DIEL-001
Warning
Plasma instability
...
DIEL-032
Critical
Deposition rate too low
...
DIEL-049
Minor
Plasma instability
...
DIEL-008
Major
Deposition rate too low
...
DIEL-040
Major
Film uniformity issue
...
DIEL-003
Warning
Deposition rate too low
...
DIEL-014
Warning
Plasma instability
...
DIEL-009
Critical
Plasma instability
...
DIEL-006
Minor
Film uniformity issue
...
DIEL-047
Critical
Plasma instability
...
DIEL-020
Major
Deposition rate too low
...
DIEL-024
Critical
Film uniformity issue
...
DIEL-040
Major
Film uniformity issue
...
DIEL-050
Major
Film uniformity issue
...
DIEL-036
Critical
Deposition rate too low
...
DIEL-044
Critical
Film uniformity issue
...
DIEL-002
Warning
Film uniformity issue
...
DIEL-046
Warning
Film uniformity issue
...
DIEL-022
Warning
Film uniformity issue
...
DIEL-044
Major
Film uniformity issue
...
DIEL-040
Critical
Deposition rate too low
...
DIEL-034
Critical
Film uniformity issue
...
DIEL-015
Minor
Deposition rate too low
...
DIEL-012
Critical
Film uniformity issue
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIEL-029
MaterialUnloaded
3
...
DIEL-001
MaterialLoaded
39
...
DIEL-047
MaterialUnloaded
95
...
DIEL-025
ProcessingCompleted
36
...
DIEL-050
ControlStateChanged
13
...
DIEL-050
ProcessingCompleted
24
...
DIEL-050
ProcessingCompleted
17
...
DIEL-029
MaterialLoaded
38
...
DIEL-034
MaterialUnloaded
21
...
DIEL-009
ProcessingStarted
0
...
DIEL-001
MaterialLoaded
16
...
DIEL-012
ProcessingStarted
37
...
DIEL-029
MaterialUnloaded
10
...
DIEL-002
ProcessingCompleted
7
...
DIEL-041
MaterialUnloaded
14
...
DIEL-024
ProcessingCompleted
7
...
DIEL-020
ProcessingStarted
75
...
DIEL-006
ProcessingCompleted
22
...
DIEL-003
ControlStateChanged
12
...
DIEL-008
ProcessingStarted
35
...
DIEL-046
ProcessingStarted
14
...
DIEL-002
ControlStateChanged
37
...
DIEL-031
ControlStateChanged
17
...
DIEL-002
ControlStateChanged
80
...
DIEL-008
MaterialLoaded
20
...
DIEL-023
ProcessingStarted
4
...
DIEL-042
MaterialUnloaded
74
...
DIEL-014
ProcessingCompleted
25
...
DIEL-019
ControlStateChanged
0
...
DIEL-047
ProcessingCompleted
13
...
DIEL-020
MaterialLoaded
13
...
DIEL-037
MaterialLoaded
13
...
DIEL-047
ProcessingCompleted
8
...
DIEL-033
MaterialLoaded
4
...
DIEL-036
MaterialLoaded
32
...
DIEL-038
ProcessingStarted
39
...
DIEL-043
ProcessingCompleted
35
...
DIEL-023
MaterialLoaded
83
...
DIEL-009
MaterialLoaded
33
...
DIEL-019
ControlStateChanged
24
...
DIEL-048
ProcessingStarted
26
...
DIEL-007
MaterialUnloaded
30
...
DIEL-033
MaterialLoaded
3
...
DIEL-002
MaterialLoaded
11
...
DIEL-036
MaterialUnloaded
83
...
DIEL-021
MaterialLoaded
6
...
DIEL-047
ProcessingCompleted
2
...
DIEL-049
MaterialUnloaded
75
...
DIEL-025
MaterialUnloaded
17
...
DIEL-010
ControlStateChanged
13
...