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Dielectrics Dashboard
Real-time status, alarms, and events for all Dielectrics tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIEL-001
DIEL-002
DIEL-003
DIEL-004
DIEL-005
DIEL-006
DIEL-007
DIEL-008
DIEL-009
DIEL-010
DIEL-011
DIEL-012
DIEL-013
DIEL-014
DIEL-015
DIEL-016
DIEL-017
DIEL-018
DIEL-019
DIEL-020
DIEL-021
DIEL-022
DIEL-023
DIEL-024
DIEL-025
DIEL-026
DIEL-027
DIEL-028
DIEL-029
DIEL-030
DIEL-031
DIEL-032
DIEL-033
DIEL-034
DIEL-035
DIEL-036
DIEL-037
DIEL-038
DIEL-039
DIEL-040
DIEL-041
DIEL-042
DIEL-043
DIEL-044
DIEL-045
DIEL-046
DIEL-047
DIEL-048
DIEL-049
DIEL-050
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIEL-004
Critical
Deposition rate too low
...
DIEL-038
Critical
Plasma instability
...
DIEL-049
Major
Deposition rate too low
...
DIEL-001
Critical
Deposition rate too low
...
DIEL-012
Minor
Deposition rate too low
...
DIEL-025
Warning
Film uniformity issue
...
DIEL-042
Critical
Deposition rate too low
...
DIEL-046
Critical
Deposition rate too low
...
DIEL-040
Major
Film uniformity issue
...
DIEL-029
Critical
Deposition rate too low
...
DIEL-046
Major
Plasma instability
...
DIEL-048
Warning
Plasma instability
...
DIEL-043
Major
Film uniformity issue
...
DIEL-039
Critical
Deposition rate too low
...
DIEL-003
Major
Deposition rate too low
...
DIEL-009
Warning
Plasma instability
...
DIEL-018
Critical
Film uniformity issue
...
DIEL-012
Warning
Plasma instability
...
DIEL-001
Minor
Plasma instability
...
DIEL-013
Minor
Plasma instability
...
DIEL-004
Minor
Deposition rate too low
...
DIEL-006
Major
Deposition rate too low
...
DIEL-045
Warning
Deposition rate too low
...
DIEL-022
Major
Deposition rate too low
...
DIEL-026
Critical
Plasma instability
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIEL-048
ProcessingStarted
35
...
DIEL-016
ProcessingCompleted
8
...
DIEL-006
ProcessingStarted
0
...
DIEL-022
MaterialUnloaded
3
...
DIEL-026
MaterialUnloaded
70
...
DIEL-029
MaterialLoaded
2
...
DIEL-009
MaterialLoaded
23
...
DIEL-047
ControlStateChanged
90
...
DIEL-016
MaterialUnloaded
5
...
DIEL-047
MaterialLoaded
23
...
DIEL-040
ProcessingStarted
72
...
DIEL-007
MaterialLoaded
33
...
DIEL-011
ProcessingCompleted
1
...
DIEL-036
ProcessingStarted
33
...
DIEL-044
ControlStateChanged
12
...
DIEL-021
MaterialLoaded
29
...
DIEL-021
ProcessingStarted
23
...
DIEL-004
MaterialUnloaded
10
...
DIEL-018
ProcessingCompleted
13
...
DIEL-043
ProcessingCompleted
99
...
DIEL-042
ProcessingCompleted
85
...
DIEL-009
ProcessingStarted
17
...
DIEL-019
ProcessingCompleted
7
...
DIEL-009
ControlStateChanged
27
...
DIEL-011
MaterialUnloaded
1
...
DIEL-043
MaterialLoaded
37
...
DIEL-030
MaterialLoaded
37
...
DIEL-028
ControlStateChanged
3
...
DIEL-019
ProcessingStarted
24
...
DIEL-011
ProcessingCompleted
95
...
DIEL-027
ControlStateChanged
28
...
DIEL-004
MaterialUnloaded
82
...
DIEL-008
MaterialLoaded
17
...
DIEL-049
ControlStateChanged
1
...
DIEL-001
MaterialUnloaded
80
...
DIEL-012
ProcessingStarted
35
...
DIEL-012
MaterialUnloaded
4
...
DIEL-009
ProcessingCompleted
34
...
DIEL-012
ProcessingCompleted
1
...
DIEL-028
ProcessingStarted
13
...
DIEL-012
MaterialLoaded
83
...
DIEL-011
ProcessingCompleted
32
...
DIEL-044
MaterialLoaded
0
...
DIEL-032
ProcessingCompleted
20
...
DIEL-019
ProcessingCompleted
17
...
DIEL-026
ProcessingStarted
16
...
DIEL-033
MaterialUnloaded
7
...
DIEL-043
ProcessingStarted
39
...
DIEL-018
MaterialLoaded
16
...
DIEL-034
MaterialLoaded
25
...