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Dielectrics Dashboard
Real-time status, alarms, and events for all Dielectrics tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIEL-001
DIEL-002
DIEL-003
DIEL-004
DIEL-005
DIEL-006
DIEL-007
DIEL-008
DIEL-009
DIEL-010
DIEL-011
DIEL-012
DIEL-013
DIEL-014
DIEL-015
DIEL-016
DIEL-017
DIEL-018
DIEL-019
DIEL-020
DIEL-021
DIEL-022
DIEL-023
DIEL-024
DIEL-025
DIEL-026
DIEL-027
DIEL-028
DIEL-029
DIEL-030
DIEL-031
DIEL-032
DIEL-033
DIEL-034
DIEL-035
DIEL-036
DIEL-037
DIEL-038
DIEL-039
DIEL-040
DIEL-041
DIEL-042
DIEL-043
DIEL-044
DIEL-045
DIEL-046
DIEL-047
DIEL-048
DIEL-049
DIEL-050
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIEL-034
Warning
Plasma instability
...
DIEL-017
Warning
Plasma instability
...
DIEL-007
Major
Film uniformity issue
...
DIEL-024
Major
Deposition rate too low
...
DIEL-010
Critical
Film uniformity issue
...
DIEL-039
Major
Plasma instability
...
DIEL-042
Warning
Plasma instability
...
DIEL-026
Critical
Film uniformity issue
...
DIEL-048
Major
Deposition rate too low
...
DIEL-020
Major
Plasma instability
...
DIEL-012
Major
Film uniformity issue
...
DIEL-029
Warning
Deposition rate too low
...
DIEL-006
Warning
Deposition rate too low
...
DIEL-039
Warning
Deposition rate too low
...
DIEL-001
Warning
Film uniformity issue
...
DIEL-041
Minor
Film uniformity issue
...
DIEL-022
Major
Plasma instability
...
DIEL-018
Critical
Film uniformity issue
...
DIEL-013
Minor
Deposition rate too low
...
DIEL-030
Warning
Deposition rate too low
...
DIEL-015
Major
Film uniformity issue
...
DIEL-049
Warning
Film uniformity issue
...
DIEL-003
Critical
Deposition rate too low
...
DIEL-024
Major
Film uniformity issue
...
DIEL-020
Warning
Deposition rate too low
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIEL-038
MaterialUnloaded
33
...
DIEL-013
MaterialLoaded
0
...
DIEL-003
MaterialLoaded
26
...
DIEL-014
MaterialLoaded
37
...
DIEL-020
ProcessingCompleted
35
...
DIEL-001
MaterialUnloaded
18
...
DIEL-043
ControlStateChanged
27
...
DIEL-046
MaterialUnloaded
95
...
DIEL-004
ProcessingStarted
0
...
DIEL-020
ControlStateChanged
11
...
DIEL-046
MaterialLoaded
0
...
DIEL-013
ControlStateChanged
34
...
DIEL-007
ProcessingStarted
19
...
DIEL-011
ProcessingStarted
9
...
DIEL-009
MaterialLoaded
15
...
DIEL-019
ProcessingStarted
76
...
DIEL-050
ProcessingStarted
4
...
DIEL-048
MaterialUnloaded
33
...
DIEL-019
MaterialLoaded
36
...
DIEL-029
ControlStateChanged
9
...
DIEL-039
ControlStateChanged
38
...
DIEL-004
MaterialUnloaded
19
...
DIEL-006
ControlStateChanged
12
...
DIEL-041
ProcessingStarted
37
...
DIEL-048
MaterialLoaded
36
...
DIEL-008
MaterialLoaded
26
...
DIEL-016
MaterialLoaded
0
...
DIEL-039
MaterialUnloaded
24
...
DIEL-048
MaterialUnloaded
9
...
DIEL-011
ProcessingStarted
24
...
DIEL-024
MaterialLoaded
95
...
DIEL-017
MaterialLoaded
26
...
DIEL-030
MaterialUnloaded
20
...
DIEL-038
ProcessingCompleted
14
...
DIEL-024
ProcessingCompleted
34
...
DIEL-023
MaterialUnloaded
8
...
DIEL-041
ControlStateChanged
5
...
DIEL-019
MaterialLoaded
9
...
DIEL-036
ProcessingCompleted
7
...
DIEL-049
MaterialLoaded
22
...
DIEL-041
ProcessingStarted
31
...
DIEL-010
MaterialLoaded
17
...
DIEL-020
ControlStateChanged
5
...
DIEL-005
ControlStateChanged
5
...
DIEL-006
MaterialLoaded
29
...
DIEL-044
MaterialUnloaded
35
...
DIEL-013
ProcessingStarted
1
...
DIEL-035
ControlStateChanged
22
...
DIEL-015
ControlStateChanged
26
...
DIEL-047
MaterialLoaded
32
...