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Dielectrics Dashboard
Real-time status, alarms, and events for all Dielectrics tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIEL-001
DIEL-002
DIEL-003
DIEL-004
DIEL-005
DIEL-006
DIEL-007
DIEL-008
DIEL-009
DIEL-010
DIEL-011
DIEL-012
DIEL-013
DIEL-014
DIEL-015
DIEL-016
DIEL-017
DIEL-018
DIEL-019
DIEL-020
DIEL-021
DIEL-022
DIEL-023
DIEL-024
DIEL-025
DIEL-026
DIEL-027
DIEL-028
DIEL-029
DIEL-030
DIEL-031
DIEL-032
DIEL-033
DIEL-034
DIEL-035
DIEL-036
DIEL-037
DIEL-038
DIEL-039
DIEL-040
DIEL-041
DIEL-042
DIEL-043
DIEL-044
DIEL-045
DIEL-046
DIEL-047
DIEL-048
DIEL-049
DIEL-050
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIEL-012
Critical
Film uniformity issue
...
DIEL-025
Critical
Film uniformity issue
...
DIEL-035
Major
Deposition rate too low
...
DIEL-047
Minor
Film uniformity issue
...
DIEL-041
Warning
Film uniformity issue
...
DIEL-009
Warning
Film uniformity issue
...
DIEL-036
Minor
Film uniformity issue
...
DIEL-028
Minor
Deposition rate too low
...
DIEL-003
Minor
Plasma instability
...
DIEL-010
Warning
Film uniformity issue
...
DIEL-016
Major
Film uniformity issue
...
DIEL-046
Critical
Deposition rate too low
...
DIEL-031
Minor
Deposition rate too low
...
DIEL-013
Major
Deposition rate too low
...
DIEL-036
Warning
Plasma instability
...
DIEL-042
Warning
Plasma instability
...
DIEL-024
Major
Film uniformity issue
...
DIEL-042
Major
Plasma instability
...
DIEL-036
Warning
Deposition rate too low
...
DIEL-022
Major
Plasma instability
...
DIEL-026
Major
Deposition rate too low
...
DIEL-035
Minor
Film uniformity issue
...
DIEL-006
Major
Plasma instability
...
DIEL-018
Minor
Deposition rate too low
...
DIEL-046
Major
Film uniformity issue
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIEL-049
MaterialUnloaded
33
...
DIEL-031
ProcessingCompleted
21
...
DIEL-037
MaterialLoaded
38
...
DIEL-038
ProcessingStarted
37
...
DIEL-042
ControlStateChanged
35
...
DIEL-003
ProcessingStarted
15
...
DIEL-026
ControlStateChanged
38
...
DIEL-011
ProcessingStarted
0
...
DIEL-011
MaterialUnloaded
1
...
DIEL-037
ProcessingCompleted
8
...
DIEL-009
MaterialUnloaded
17
...
DIEL-048
MaterialUnloaded
18
...
DIEL-004
ControlStateChanged
29
...
DIEL-020
ProcessingCompleted
4
...
DIEL-014
ControlStateChanged
34
...
DIEL-029
MaterialUnloaded
1
...
DIEL-004
ProcessingStarted
1
...
DIEL-008
MaterialLoaded
4
...
DIEL-019
ProcessingStarted
33
...
DIEL-036
ControlStateChanged
33
...
DIEL-045
ProcessingStarted
77
...
DIEL-017
ControlStateChanged
81
...
DIEL-003
ProcessingStarted
27
...
DIEL-033
MaterialUnloaded
20
...
DIEL-007
MaterialLoaded
6
...
DIEL-018
MaterialLoaded
37
...
DIEL-024
MaterialUnloaded
38
...
DIEL-026
MaterialUnloaded
13
...
DIEL-038
ProcessingCompleted
81
...
DIEL-012
ProcessingStarted
21
...
DIEL-028
MaterialUnloaded
95
...
DIEL-028
ProcessingCompleted
27
...
DIEL-022
ProcessingStarted
22
...
DIEL-013
ControlStateChanged
25
...
DIEL-023
MaterialLoaded
85
...
DIEL-024
ProcessingCompleted
0
...
DIEL-008
ProcessingCompleted
20
...
DIEL-005
ProcessingCompleted
29
...
DIEL-035
MaterialLoaded
36
...
DIEL-046
MaterialLoaded
39
...
DIEL-044
ProcessingStarted
17
...
DIEL-014
ProcessingCompleted
39
...
DIEL-027
MaterialUnloaded
24
...
DIEL-041
ControlStateChanged
32
...
DIEL-018
ControlStateChanged
37
...
DIEL-019
MaterialUnloaded
8
...
DIEL-004
ProcessingCompleted
38
...
DIEL-041
ControlStateChanged
79
...
DIEL-023
ProcessingStarted
23
...
DIEL-016
MaterialUnloaded
14
...