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Dielectrics Dashboard
Real-time status, alarms, and events for all Dielectrics tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
DIEL-001
DIEL-002
DIEL-003
DIEL-004
DIEL-005
DIEL-006
DIEL-007
DIEL-008
DIEL-009
DIEL-010
DIEL-011
DIEL-012
DIEL-013
DIEL-014
DIEL-015
DIEL-016
DIEL-017
DIEL-018
DIEL-019
DIEL-020
DIEL-021
DIEL-022
DIEL-023
DIEL-024
DIEL-025
DIEL-026
DIEL-027
DIEL-028
DIEL-029
DIEL-030
DIEL-031
DIEL-032
DIEL-033
DIEL-034
DIEL-035
DIEL-036
DIEL-037
DIEL-038
DIEL-039
DIEL-040
DIEL-041
DIEL-042
DIEL-043
DIEL-044
DIEL-045
DIEL-046
DIEL-047
DIEL-048
DIEL-049
DIEL-050
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Processing
Idle
Engineering
Scheduled Down
Unscheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
DIEL-040
Critical
Deposition rate too low
...
DIEL-008
Critical
Deposition rate too low
...
DIEL-012
Warning
Deposition rate too low
...
DIEL-014
Minor
Deposition rate too low
...
DIEL-030
Warning
Plasma instability
...
DIEL-019
Warning
Plasma instability
...
DIEL-037
Critical
Deposition rate too low
...
DIEL-024
Major
Plasma instability
...
DIEL-018
Critical
Deposition rate too low
...
DIEL-016
Major
Plasma instability
...
DIEL-012
Warning
Deposition rate too low
...
DIEL-021
Critical
Plasma instability
...
DIEL-026
Critical
Film uniformity issue
...
DIEL-036
Major
Plasma instability
...
DIEL-019
Warning
Film uniformity issue
...
DIEL-029
Minor
Deposition rate too low
...
DIEL-036
Warning
Film uniformity issue
...
DIEL-013
Major
Plasma instability
...
DIEL-025
Critical
Film uniformity issue
...
DIEL-004
Major
Film uniformity issue
...
DIEL-003
Minor
Film uniformity issue
...
DIEL-041
Major
Film uniformity issue
...
DIEL-025
Major
Plasma instability
...
DIEL-025
Critical
Plasma instability
...
DIEL-019
Warning
Film uniformity issue
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
DIEL-020
ProcessingStarted
7
...
DIEL-041
ProcessingCompleted
36
...
DIEL-022
ControlStateChanged
35
...
DIEL-024
MaterialLoaded
9
...
DIEL-004
MaterialUnloaded
1
...
DIEL-026
MaterialLoaded
70
...
DIEL-042
MaterialUnloaded
20
...
DIEL-013
ProcessingCompleted
31
...
DIEL-012
MaterialLoaded
90
...
DIEL-007
ProcessingStarted
28
...
DIEL-012
MaterialUnloaded
21
...
DIEL-026
ProcessingStarted
22
...
DIEL-016
MaterialUnloaded
28
...
DIEL-038
MaterialLoaded
11
...
DIEL-015
MaterialLoaded
0
...
DIEL-039
MaterialUnloaded
32
...
DIEL-017
MaterialUnloaded
96
...
DIEL-011
MaterialLoaded
38
...
DIEL-038
MaterialUnloaded
33
...
DIEL-049
ControlStateChanged
85
...
DIEL-050
ProcessingStarted
24
...
DIEL-030
MaterialLoaded
33
...
DIEL-032
MaterialUnloaded
92
...
DIEL-013
ProcessingCompleted
29
...
DIEL-009
ProcessingCompleted
1
...
DIEL-013
MaterialUnloaded
13
...
DIEL-011
ProcessingStarted
34
...
DIEL-035
MaterialLoaded
86
...
DIEL-031
ProcessingCompleted
31
...
DIEL-016
MaterialLoaded
19
...
DIEL-010
ProcessingCompleted
27
...
DIEL-030
ControlStateChanged
26
...
DIEL-016
ControlStateChanged
27
...
DIEL-034
MaterialUnloaded
12
...
DIEL-002
MaterialUnloaded
25
...
DIEL-003
ProcessingStarted
32
...
DIEL-026
ControlStateChanged
94
...
DIEL-037
ProcessingStarted
31
...
DIEL-035
MaterialLoaded
19
...
DIEL-047
ProcessingStarted
32
...
DIEL-031
MaterialLoaded
34
...
DIEL-040
MaterialLoaded
29
...
DIEL-009
ProcessingStarted
15
...
DIEL-050
ControlStateChanged
14
...
DIEL-020
ProcessingCompleted
22
...
DIEL-008
MaterialUnloaded
21
...
DIEL-011
ControlStateChanged
14
...
DIEL-002
ProcessingCompleted
4
...
DIEL-023
ProcessingCompleted
31
...
DIEL-022
ProcessingStarted
6
...