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Metrology Dashboard
Real-time status, alarms, and events for all Metrology tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
METR-001
METR-002
METR-003
METR-004
METR-005
METR-006
METR-007
METR-008
METR-009
METR-010
METR-011
METR-012
METR-013
METR-014
METR-015
METR-016
METR-017
METR-018
METR-019
METR-020
METR-021
METR-022
METR-023
METR-024
METR-025
METR-026
METR-027
METR-028
METR-029
METR-030
METR-031
METR-032
METR-033
METR-034
METR-035
METR-036
METR-037
METR-038
METR-039
METR-040
METR-041
METR-042
METR-043
METR-044
METR-045
METR-046
METR-047
METR-048
METR-049
METR-050
METR-051
METR-052
METR-053
METR-054
METR-055
METR-056
METR-057
METR-058
METR-059
METR-060
METR-061
METR-062
METR-063
METR-064
METR-065
METR-066
METR-067
METR-068
METR-069
METR-070
METR-071
METR-072
METR-073
METR-074
METR-075
METR-076
METR-077
METR-078
METR-079
METR-080
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
METR-080
Critical
Stage positioning error
...
METR-035
Major
Objective lens focus drift
...
METR-039
Major
Laser intensity out of range
...
METR-062
Warning
Objective lens focus drift
...
METR-056
Critical
Stage positioning error
...
METR-018
Major
Objective lens focus drift
...
METR-042
Major
Stage positioning error
...
METR-055
Critical
Stage positioning error
...
METR-079
Critical
Laser intensity out of range
...
METR-059
Critical
Laser intensity out of range
...
METR-047
Minor
Stage positioning error
...
METR-011
Warning
Stage positioning error
...
METR-040
Warning
Stage positioning error
...
METR-037
Warning
Stage positioning error
...
METR-049
Critical
Stage positioning error
...
METR-007
Major
Stage positioning error
...
METR-011
Warning
Laser intensity out of range
...
METR-036
Critical
Objective lens focus drift
...
METR-077
Warning
Stage positioning error
...
METR-060
Major
Laser intensity out of range
...
METR-035
Major
Stage positioning error
...
METR-034
Major
Stage positioning error
...
METR-045
Warning
Stage positioning error
...
METR-022
Warning
Objective lens focus drift
...
METR-060
Warning
Stage positioning error
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
METR-017
MaterialUnloaded
25
...
METR-080
ProcessingStarted
29
...
METR-051
ProcessingStarted
9
...
METR-027
ControlStateChanged
6
...
METR-066
MaterialLoaded
18
...
METR-062
MaterialUnloaded
84
...
METR-058
MaterialUnloaded
18
...
METR-069
MaterialUnloaded
15
...
METR-075
ControlStateChanged
38
...
METR-002
MaterialLoaded
21
...
METR-022
MaterialLoaded
5
...
METR-043
ProcessingStarted
8
...
METR-022
ProcessingCompleted
10
...
METR-076
MaterialLoaded
20
...
METR-065
ControlStateChanged
36
...
METR-068
MaterialLoaded
6
...
METR-062
MaterialLoaded
34
...
METR-076
ProcessingCompleted
37
...
METR-019
MaterialLoaded
29
...
METR-076
MaterialLoaded
0
...
METR-059
MaterialUnloaded
19
...
METR-028
ProcessingStarted
28
...
METR-065
ProcessingCompleted
13
...
METR-055
ProcessingCompleted
21
...
METR-008
MaterialLoaded
16
...
METR-032
ControlStateChanged
17
...
METR-016
ControlStateChanged
83
...
METR-061
ControlStateChanged
4
...
METR-024
ProcessingStarted
12
...
METR-051
ProcessingStarted
20
...
METR-036
ProcessingCompleted
12
...
METR-036
MaterialUnloaded
95
...
METR-033
MaterialUnloaded
11
...
METR-055
ControlStateChanged
18
...
METR-074
ProcessingCompleted
28
...
METR-040
ProcessingStarted
4
...
METR-039
MaterialLoaded
28
...
METR-005
MaterialLoaded
31
...
METR-016
ProcessingCompleted
9
...
METR-002
ControlStateChanged
8
...
METR-057
ControlStateChanged
73
...
METR-042
ProcessingCompleted
38
...
METR-046
MaterialUnloaded
1
...
METR-067
ProcessingStarted
22
...
METR-074
ControlStateChanged
33
...
METR-038
ControlStateChanged
24
...
METR-028
MaterialUnloaded
78
...
METR-071
ProcessingStarted
2
...
METR-032
MaterialLoaded
35
...
METR-041
ProcessingStarted
4
...