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Metrology Dashboard
Real-time status, alarms, and events for all Metrology tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
METR-001
METR-002
METR-003
METR-004
METR-005
METR-006
METR-007
METR-008
METR-009
METR-010
METR-011
METR-012
METR-013
METR-014
METR-015
METR-016
METR-017
METR-018
METR-019
METR-020
METR-021
METR-022
METR-023
METR-024
METR-025
METR-026
METR-027
METR-028
METR-029
METR-030
METR-031
METR-032
METR-033
METR-034
METR-035
METR-036
METR-037
METR-038
METR-039
METR-040
METR-041
METR-042
METR-043
METR-044
METR-045
METR-046
METR-047
METR-048
METR-049
METR-050
METR-051
METR-052
METR-053
METR-054
METR-055
METR-056
METR-057
METR-058
METR-059
METR-060
METR-061
METR-062
METR-063
METR-064
METR-065
METR-066
METR-067
METR-068
METR-069
METR-070
METR-071
METR-072
METR-073
METR-074
METR-075
METR-076
METR-077
METR-078
METR-079
METR-080
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
METR-017
Minor
Stage positioning error
...
METR-003
Critical
Objective lens focus drift
...
METR-003
Critical
Objective lens focus drift
...
METR-061
Major
Stage positioning error
...
METR-029
Critical
Objective lens focus drift
...
METR-069
Major
Objective lens focus drift
...
METR-065
Critical
Objective lens focus drift
...
METR-035
Warning
Laser intensity out of range
...
METR-067
Warning
Stage positioning error
...
METR-080
Major
Laser intensity out of range
...
METR-053
Critical
Laser intensity out of range
...
METR-009
Major
Laser intensity out of range
...
METR-027
Warning
Objective lens focus drift
...
METR-025
Critical
Laser intensity out of range
...
METR-043
Major
Objective lens focus drift
...
METR-011
Critical
Laser intensity out of range
...
METR-073
Critical
Laser intensity out of range
...
METR-026
Critical
Stage positioning error
...
METR-007
Major
Laser intensity out of range
...
METR-002
Major
Stage positioning error
...
METR-068
Critical
Objective lens focus drift
...
METR-025
Critical
Objective lens focus drift
...
METR-070
Minor
Stage positioning error
...
METR-064
Warning
Stage positioning error
...
METR-003
Warning
Stage positioning error
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
METR-029
ProcessingCompleted
8
...
METR-009
MaterialLoaded
5
...
METR-053
MaterialLoaded
76
...
METR-028
MaterialLoaded
31
...
METR-080
MaterialLoaded
38
...
METR-006
ControlStateChanged
20
...
METR-060
ProcessingStarted
11
...
METR-031
MaterialLoaded
97
...
METR-076
MaterialUnloaded
12
...
METR-071
MaterialLoaded
22
...
METR-043
MaterialUnloaded
26
...
METR-020
ProcessingStarted
31
...
METR-065
MaterialLoaded
10
...
METR-043
MaterialUnloaded
22
...
METR-037
MaterialUnloaded
34
...
METR-063
MaterialLoaded
80
...
METR-034
MaterialLoaded
15
...
METR-070
MaterialUnloaded
4
...
METR-063
ProcessingCompleted
14
...
METR-012
ProcessingCompleted
16
...
METR-005
MaterialLoaded
26
...
METR-022
ProcessingCompleted
4
...
METR-028
ProcessingCompleted
18
...
METR-029
ControlStateChanged
74
...
METR-050
MaterialUnloaded
35
...
METR-041
ProcessingStarted
18
...
METR-036
MaterialUnloaded
19
...
METR-037
MaterialLoaded
11
...
METR-054
ProcessingStarted
20
...
METR-064
MaterialLoaded
37
...
METR-011
MaterialUnloaded
32
...
METR-011
MaterialLoaded
13
...
METR-033
MaterialUnloaded
11
...
METR-041
MaterialLoaded
4
...
METR-034
ProcessingStarted
72
...
METR-057
MaterialUnloaded
12
...
METR-064
MaterialUnloaded
33
...
METR-055
ProcessingStarted
35
...
METR-075
ControlStateChanged
7
...
METR-005
MaterialUnloaded
16
...
METR-035
ProcessingCompleted
2
...
METR-052
ProcessingCompleted
27
...
METR-030
MaterialLoaded
39
...
METR-009
ControlStateChanged
28
...
METR-010
ControlStateChanged
19
...
METR-080
ControlStateChanged
39
...
METR-011
MaterialLoaded
99
...
METR-066
ProcessingStarted
22
...
METR-018
MaterialUnloaded
26
...
METR-021
ProcessingCompleted
21
...