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Metrology Dashboard
Real-time status, alarms, and events for all Metrology tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
METR-001
METR-002
METR-003
METR-004
METR-005
METR-006
METR-007
METR-008
METR-009
METR-010
METR-011
METR-012
METR-013
METR-014
METR-015
METR-016
METR-017
METR-018
METR-019
METR-020
METR-021
METR-022
METR-023
METR-024
METR-025
METR-026
METR-027
METR-028
METR-029
METR-030
METR-031
METR-032
METR-033
METR-034
METR-035
METR-036
METR-037
METR-038
METR-039
METR-040
METR-041
METR-042
METR-043
METR-044
METR-045
METR-046
METR-047
METR-048
METR-049
METR-050
METR-051
METR-052
METR-053
METR-054
METR-055
METR-056
METR-057
METR-058
METR-059
METR-060
METR-061
METR-062
METR-063
METR-064
METR-065
METR-066
METR-067
METR-068
METR-069
METR-070
METR-071
METR-072
METR-073
METR-074
METR-075
METR-076
METR-077
METR-078
METR-079
METR-080
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
METR-068
Critical
Laser intensity out of range
...
METR-078
Critical
Laser intensity out of range
...
METR-021
Warning
Laser intensity out of range
...
METR-020
Critical
Stage positioning error
...
METR-013
Minor
Laser intensity out of range
...
METR-030
Major
Objective lens focus drift
...
METR-056
Critical
Laser intensity out of range
...
METR-048
Minor
Stage positioning error
...
METR-011
Critical
Objective lens focus drift
...
METR-059
Critical
Laser intensity out of range
...
METR-014
Minor
Laser intensity out of range
...
METR-076
Critical
Objective lens focus drift
...
METR-058
Major
Laser intensity out of range
...
METR-005
Critical
Objective lens focus drift
...
METR-052
Major
Laser intensity out of range
...
METR-040
Critical
Laser intensity out of range
...
METR-065
Warning
Objective lens focus drift
...
METR-062
Critical
Laser intensity out of range
...
METR-041
Major
Stage positioning error
...
METR-033
Critical
Objective lens focus drift
...
METR-080
Warning
Objective lens focus drift
...
METR-004
Warning
Objective lens focus drift
...
METR-008
Warning
Laser intensity out of range
...
METR-064
Major
Objective lens focus drift
...
METR-061
Critical
Laser intensity out of range
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
METR-025
MaterialLoaded
23
...
METR-074
MaterialUnloaded
27
...
METR-036
ProcessingStarted
70
...
METR-025
MaterialUnloaded
16
...
METR-071
MaterialLoaded
21
...
METR-028
ProcessingStarted
6
...
METR-054
ControlStateChanged
13
...
METR-013
MaterialUnloaded
87
...
METR-064
ControlStateChanged
14
...
METR-011
MaterialUnloaded
35
...
METR-049
ProcessingStarted
10
...
METR-074
ProcessingStarted
23
...
METR-051
ControlStateChanged
36
...
METR-058
ControlStateChanged
80
...
METR-071
ProcessingStarted
93
...
METR-017
ProcessingStarted
4
...
METR-072
MaterialLoaded
33
...
METR-030
MaterialUnloaded
34
...
METR-060
MaterialLoaded
0
...
METR-025
ProcessingCompleted
88
...
METR-013
MaterialUnloaded
26
...
METR-010
MaterialUnloaded
19
...
METR-061
MaterialLoaded
24
...
METR-001
ControlStateChanged
3
...
METR-047
ProcessingCompleted
0
...
METR-007
ProcessingCompleted
35
...
METR-040
MaterialLoaded
16
...
METR-060
MaterialLoaded
32
...
METR-013
ProcessingCompleted
22
...
METR-005
ProcessingCompleted
34
...
METR-004
ProcessingStarted
20
...
METR-010
ControlStateChanged
5
...
METR-063
ProcessingCompleted
5
...
METR-035
MaterialUnloaded
1
...
METR-040
ControlStateChanged
32
...
METR-041
ProcessingCompleted
9
...
METR-022
MaterialLoaded
18
...
METR-016
ControlStateChanged
7
...
METR-034
ControlStateChanged
36
...
METR-059
ProcessingStarted
22
...
METR-041
MaterialLoaded
18
...
METR-026
MaterialLoaded
10
...
METR-079
ProcessingStarted
87
...
METR-052
MaterialUnloaded
18
...
METR-074
MaterialUnloaded
35
...
METR-028
ControlStateChanged
26
...
METR-051
ProcessingCompleted
29
...
METR-038
MaterialUnloaded
25
...
METR-063
ProcessingStarted
38
...
METR-069
ControlStateChanged
3
...