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Metrology Dashboard
Real-time status, alarms, and events for all Metrology tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
METR-001
METR-002
METR-003
METR-004
METR-005
METR-006
METR-007
METR-008
METR-009
METR-010
METR-011
METR-012
METR-013
METR-014
METR-015
METR-016
METR-017
METR-018
METR-019
METR-020
METR-021
METR-022
METR-023
METR-024
METR-025
METR-026
METR-027
METR-028
METR-029
METR-030
METR-031
METR-032
METR-033
METR-034
METR-035
METR-036
METR-037
METR-038
METR-039
METR-040
METR-041
METR-042
METR-043
METR-044
METR-045
METR-046
METR-047
METR-048
METR-049
METR-050
METR-051
METR-052
METR-053
METR-054
METR-055
METR-056
METR-057
METR-058
METR-059
METR-060
METR-061
METR-062
METR-063
METR-064
METR-065
METR-066
METR-067
METR-068
METR-069
METR-070
METR-071
METR-072
METR-073
METR-074
METR-075
METR-076
METR-077
METR-078
METR-079
METR-080
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
METR-057
Major
Stage positioning error
...
METR-022
Major
Laser intensity out of range
...
METR-035
Major
Laser intensity out of range
...
METR-034
Critical
Objective lens focus drift
...
METR-007
Warning
Laser intensity out of range
...
METR-046
Major
Laser intensity out of range
...
METR-021
Critical
Stage positioning error
...
METR-007
Critical
Objective lens focus drift
...
METR-032
Major
Stage positioning error
...
METR-036
Major
Laser intensity out of range
...
METR-023
Minor
Laser intensity out of range
...
METR-025
Critical
Objective lens focus drift
...
METR-040
Major
Stage positioning error
...
METR-007
Major
Laser intensity out of range
...
METR-079
Minor
Objective lens focus drift
...
METR-026
Warning
Stage positioning error
...
METR-046
Critical
Stage positioning error
...
METR-048
Major
Objective lens focus drift
...
METR-062
Major
Laser intensity out of range
...
METR-068
Warning
Stage positioning error
...
METR-063
Critical
Objective lens focus drift
...
METR-003
Critical
Stage positioning error
...
METR-006
Warning
Objective lens focus drift
...
METR-009
Critical
Objective lens focus drift
...
METR-038
Warning
Objective lens focus drift
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
METR-045
ProcessingCompleted
34
...
METR-078
MaterialUnloaded
74
...
METR-077
ProcessingCompleted
2
...
METR-069
ProcessingStarted
38
...
METR-043
ControlStateChanged
36
...
METR-030
MaterialUnloaded
0
...
METR-001
ProcessingCompleted
5
...
METR-071
ProcessingStarted
25
...
METR-017
MaterialUnloaded
19
...
METR-053
MaterialUnloaded
22
...
METR-014
MaterialUnloaded
86
...
METR-073
MaterialLoaded
0
...
METR-004
MaterialLoaded
32
...
METR-050
ProcessingCompleted
36
...
METR-070
ProcessingStarted
14
...
METR-048
ProcessingStarted
35
...
METR-022
ProcessingCompleted
10
...
METR-072
ControlStateChanged
4
...
METR-031
ControlStateChanged
19
...
METR-028
ProcessingCompleted
95
...
METR-073
ProcessingCompleted
20
...
METR-045
MaterialUnloaded
9
...
METR-080
MaterialLoaded
14
...
METR-016
ProcessingStarted
10
...
METR-008
ProcessingCompleted
33
...
METR-055
MaterialUnloaded
80
...
METR-059
ProcessingStarted
18
...
METR-077
ProcessingCompleted
8
...
METR-007
MaterialUnloaded
8
...
METR-014
MaterialLoaded
28
...
METR-060
MaterialLoaded
27
...
METR-034
ControlStateChanged
26
...
METR-015
MaterialUnloaded
37
...
METR-028
ProcessingStarted
13
...
METR-006
MaterialLoaded
28
...
METR-008
ControlStateChanged
20
...
METR-076
ProcessingCompleted
11
...
METR-079
ProcessingCompleted
78
...
METR-022
MaterialUnloaded
2
...
METR-007
ProcessingCompleted
32
...
METR-005
ProcessingCompleted
27
...
METR-072
MaterialUnloaded
25
...
METR-059
ProcessingCompleted
34
...
METR-016
ProcessingStarted
20
...
METR-066
ProcessingCompleted
14
...
METR-037
ProcessingStarted
1
...
METR-012
ControlStateChanged
20
...
METR-058
ProcessingStarted
34
...
METR-075
ProcessingStarted
18
...
METR-003
MaterialLoaded
37
...