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Metrology Dashboard
Real-time status, alarms, and events for all Metrology tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
METR-001
METR-002
METR-003
METR-004
METR-005
METR-006
METR-007
METR-008
METR-009
METR-010
METR-011
METR-012
METR-013
METR-014
METR-015
METR-016
METR-017
METR-018
METR-019
METR-020
METR-021
METR-022
METR-023
METR-024
METR-025
METR-026
METR-027
METR-028
METR-029
METR-030
METR-031
METR-032
METR-033
METR-034
METR-035
METR-036
METR-037
METR-038
METR-039
METR-040
METR-041
METR-042
METR-043
METR-044
METR-045
METR-046
METR-047
METR-048
METR-049
METR-050
METR-051
METR-052
METR-053
METR-054
METR-055
METR-056
METR-057
METR-058
METR-059
METR-060
METR-061
METR-062
METR-063
METR-064
METR-065
METR-066
METR-067
METR-068
METR-069
METR-070
METR-071
METR-072
METR-073
METR-074
METR-075
METR-076
METR-077
METR-078
METR-079
METR-080
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
METR-046
Warning
Laser intensity out of range
...
METR-041
Critical
Objective lens focus drift
...
METR-058
Minor
Laser intensity out of range
...
METR-047
Critical
Stage positioning error
...
METR-054
Warning
Stage positioning error
...
METR-066
Critical
Stage positioning error
...
METR-076
Major
Objective lens focus drift
...
METR-007
Critical
Objective lens focus drift
...
METR-080
Warning
Laser intensity out of range
...
METR-047
Major
Laser intensity out of range
...
METR-008
Warning
Laser intensity out of range
...
METR-028
Critical
Stage positioning error
...
METR-006
Minor
Objective lens focus drift
...
METR-021
Critical
Objective lens focus drift
...
METR-061
Major
Laser intensity out of range
...
METR-037
Critical
Objective lens focus drift
...
METR-031
Minor
Objective lens focus drift
...
METR-057
Critical
Stage positioning error
...
METR-022
Critical
Laser intensity out of range
...
METR-047
Minor
Objective lens focus drift
...
METR-064
Minor
Stage positioning error
...
METR-046
Major
Laser intensity out of range
...
METR-063
Minor
Objective lens focus drift
...
METR-040
Major
Objective lens focus drift
...
METR-025
Major
Stage positioning error
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
METR-010
ControlStateChanged
94
...
METR-054
MaterialLoaded
22
...
METR-046
ProcessingStarted
92
...
METR-018
MaterialLoaded
11
...
METR-068
ProcessingStarted
26
...
METR-011
ProcessingCompleted
24
...
METR-013
MaterialUnloaded
1
...
METR-073
MaterialUnloaded
6
...
METR-005
ProcessingCompleted
11
...
METR-028
ProcessingCompleted
71
...
METR-060
ProcessingCompleted
28
...
METR-001
MaterialLoaded
32
...
METR-036
ProcessingCompleted
5
...
METR-037
ProcessingStarted
25
...
METR-025
ControlStateChanged
13
...
METR-026
MaterialUnloaded
15
...
METR-050
ProcessingStarted
97
...
METR-032
ProcessingCompleted
6
...
METR-077
ProcessingStarted
35
...
METR-032
ControlStateChanged
32
...
METR-011
MaterialUnloaded
34
...
METR-004
ControlStateChanged
33
...
METR-066
ProcessingCompleted
1
...
METR-059
ControlStateChanged
19
...
METR-069
MaterialUnloaded
12
...
METR-054
MaterialLoaded
76
...
METR-031
MaterialLoaded
83
...
METR-049
ProcessingStarted
9
...
METR-073
MaterialLoaded
27
...
METR-069
MaterialUnloaded
22
...
METR-014
ControlStateChanged
75
...
METR-019
MaterialUnloaded
32
...
METR-066
MaterialUnloaded
36
...
METR-013
MaterialUnloaded
22
...
METR-058
ProcessingStarted
11
...
METR-030
ProcessingStarted
95
...
METR-018
ProcessingCompleted
8
...
METR-022
MaterialUnloaded
20
...
METR-075
ProcessingCompleted
36
...
METR-075
ProcessingCompleted
6
...
METR-035
ProcessingStarted
20
...
METR-020
ControlStateChanged
84
...
METR-036
ProcessingStarted
29
...
METR-052
ProcessingStarted
18
...
METR-030
ControlStateChanged
0
...
METR-060
MaterialLoaded
87
...
METR-045
ProcessingStarted
15
...
METR-077
ControlStateChanged
71
...
METR-001
ControlStateChanged
1
...
METR-044
ProcessingStarted
26
...