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Metrology Dashboard
Real-time status, alarms, and events for all Metrology tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
METR-001
METR-002
METR-003
METR-004
METR-005
METR-006
METR-007
METR-008
METR-009
METR-010
METR-011
METR-012
METR-013
METR-014
METR-015
METR-016
METR-017
METR-018
METR-019
METR-020
METR-021
METR-022
METR-023
METR-024
METR-025
METR-026
METR-027
METR-028
METR-029
METR-030
METR-031
METR-032
METR-033
METR-034
METR-035
METR-036
METR-037
METR-038
METR-039
METR-040
METR-041
METR-042
METR-043
METR-044
METR-045
METR-046
METR-047
METR-048
METR-049
METR-050
METR-051
METR-052
METR-053
METR-054
METR-055
METR-056
METR-057
METR-058
METR-059
METR-060
METR-061
METR-062
METR-063
METR-064
METR-065
METR-066
METR-067
METR-068
METR-069
METR-070
METR-071
METR-072
METR-073
METR-074
METR-075
METR-076
METR-077
METR-078
METR-079
METR-080
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
METR-065
Major
Objective lens focus drift
...
METR-076
Warning
Laser intensity out of range
...
METR-049
Major
Objective lens focus drift
...
METR-060
Critical
Stage positioning error
...
METR-068
Major
Stage positioning error
...
METR-044
Critical
Stage positioning error
...
METR-021
Minor
Laser intensity out of range
...
METR-005
Major
Objective lens focus drift
...
METR-048
Critical
Stage positioning error
...
METR-023
Critical
Stage positioning error
...
METR-056
Critical
Objective lens focus drift
...
METR-039
Warning
Objective lens focus drift
...
METR-073
Critical
Stage positioning error
...
METR-055
Major
Objective lens focus drift
...
METR-025
Warning
Objective lens focus drift
...
METR-028
Minor
Objective lens focus drift
...
METR-001
Minor
Objective lens focus drift
...
METR-043
Critical
Stage positioning error
...
METR-016
Warning
Laser intensity out of range
...
METR-032
Minor
Objective lens focus drift
...
METR-009
Major
Laser intensity out of range
...
METR-071
Major
Laser intensity out of range
...
METR-037
Major
Objective lens focus drift
...
METR-030
Major
Objective lens focus drift
...
METR-011
Major
Laser intensity out of range
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
METR-008
ProcessingStarted
21
...
METR-059
MaterialLoaded
91
...
METR-054
ProcessingCompleted
2
...
METR-050
MaterialUnloaded
19
...
METR-065
ProcessingStarted
1
...
METR-005
MaterialLoaded
7
...
METR-024
ControlStateChanged
24
...
METR-075
MaterialLoaded
6
...
METR-006
MaterialLoaded
11
...
METR-012
ProcessingCompleted
24
...
METR-023
ProcessingStarted
2
...
METR-002
ProcessingStarted
11
...
METR-072
MaterialUnloaded
19
...
METR-043
ProcessingStarted
38
...
METR-079
ProcessingCompleted
11
...
METR-069
ControlStateChanged
21
...
METR-009
ControlStateChanged
34
...
METR-016
ProcessingCompleted
37
...
METR-036
ProcessingCompleted
8
...
METR-008
MaterialUnloaded
33
...
METR-055
ControlStateChanged
7
...
METR-075
ProcessingCompleted
97
...
METR-080
MaterialUnloaded
39
...
METR-016
MaterialUnloaded
98
...
METR-044
MaterialLoaded
2
...
METR-064
ProcessingCompleted
79
...
METR-052
MaterialUnloaded
34
...
METR-021
MaterialLoaded
23
...
METR-007
ProcessingStarted
7
...
METR-068
MaterialUnloaded
36
...
METR-024
MaterialUnloaded
28
...
METR-013
MaterialUnloaded
36
...
METR-004
ControlStateChanged
32
...
METR-015
ProcessingStarted
27
...
METR-030
ControlStateChanged
81
...
METR-049
ProcessingCompleted
3
...
METR-061
MaterialUnloaded
6
...
METR-068
MaterialLoaded
3
...
METR-020
ProcessingStarted
75
...
METR-003
MaterialUnloaded
22
...
METR-075
ProcessingStarted
25
...
METR-049
MaterialUnloaded
4
...
METR-073
MaterialLoaded
20
...
METR-024
ControlStateChanged
25
...
METR-026
ProcessingCompleted
17
...
METR-075
ProcessingCompleted
36
...
METR-012
ProcessingStarted
22
...
METR-055
ProcessingCompleted
18
...
METR-063
MaterialUnloaded
16
...
METR-055
MaterialUnloaded
0
...