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Metrology Dashboard
Real-time status, alarms, and events for all Metrology tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
METR-001
METR-002
METR-003
METR-004
METR-005
METR-006
METR-007
METR-008
METR-009
METR-010
METR-011
METR-012
METR-013
METR-014
METR-015
METR-016
METR-017
METR-018
METR-019
METR-020
METR-021
METR-022
METR-023
METR-024
METR-025
METR-026
METR-027
METR-028
METR-029
METR-030
METR-031
METR-032
METR-033
METR-034
METR-035
METR-036
METR-037
METR-038
METR-039
METR-040
METR-041
METR-042
METR-043
METR-044
METR-045
METR-046
METR-047
METR-048
METR-049
METR-050
METR-051
METR-052
METR-053
METR-054
METR-055
METR-056
METR-057
METR-058
METR-059
METR-060
METR-061
METR-062
METR-063
METR-064
METR-065
METR-066
METR-067
METR-068
METR-069
METR-070
METR-071
METR-072
METR-073
METR-074
METR-075
METR-076
METR-077
METR-078
METR-079
METR-080
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Unscheduled Down
Processing
Idle
Engineering
Scheduled Down
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
METR-057
Critical
Objective lens focus drift
...
METR-048
Minor
Stage positioning error
...
METR-011
Critical
Objective lens focus drift
...
METR-067
Warning
Laser intensity out of range
...
METR-015
Critical
Stage positioning error
...
METR-035
Warning
Objective lens focus drift
...
METR-067
Warning
Objective lens focus drift
...
METR-075
Minor
Stage positioning error
...
METR-042
Major
Laser intensity out of range
...
METR-059
Warning
Stage positioning error
...
METR-026
Critical
Laser intensity out of range
...
METR-069
Critical
Laser intensity out of range
...
METR-073
Major
Laser intensity out of range
...
METR-018
Critical
Stage positioning error
...
METR-063
Warning
Stage positioning error
...
METR-043
Critical
Objective lens focus drift
...
METR-012
Critical
Stage positioning error
...
METR-080
Minor
Laser intensity out of range
...
METR-058
Critical
Laser intensity out of range
...
METR-076
Major
Laser intensity out of range
...
METR-074
Critical
Laser intensity out of range
...
METR-044
Warning
Objective lens focus drift
...
METR-067
Major
Objective lens focus drift
...
METR-045
Critical
Stage positioning error
...
METR-073
Critical
Stage positioning error
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
METR-019
ControlStateChanged
16
...
METR-010
ProcessingStarted
16
...
METR-032
MaterialLoaded
1
...
METR-069
ProcessingCompleted
19
...
METR-016
ProcessingStarted
17
...
METR-040
MaterialLoaded
96
...
METR-011
MaterialLoaded
32
...
METR-057
MaterialUnloaded
18
...
METR-033
ProcessingCompleted
8
...
METR-014
ControlStateChanged
32
...
METR-067
MaterialUnloaded
9
...
METR-026
MaterialUnloaded
96
...
METR-080
ProcessingStarted
37
...
METR-050
ControlStateChanged
13
...
METR-019
MaterialUnloaded
23
...
METR-078
MaterialUnloaded
1
...
METR-078
MaterialLoaded
4
...
METR-047
ProcessingStarted
4
...
METR-047
ControlStateChanged
28
...
METR-058
ControlStateChanged
17
...
METR-020
ControlStateChanged
32
...
METR-058
MaterialUnloaded
5
...
METR-079
ProcessingStarted
0
...
METR-080
MaterialLoaded
31
...
METR-042
MaterialLoaded
39
...
METR-032
MaterialUnloaded
23
...
METR-040
MaterialLoaded
12
...
METR-027
MaterialLoaded
1
...
METR-060
MaterialUnloaded
79
...
METR-052
ProcessingStarted
32
...
METR-067
ControlStateChanged
29
...
METR-065
MaterialLoaded
13
...
METR-065
MaterialLoaded
17
...
METR-037
ProcessingStarted
29
...
METR-066
MaterialLoaded
19
...
METR-010
ProcessingStarted
14
...
METR-029
ProcessingStarted
32
...
METR-067
ProcessingStarted
32
...
METR-004
ProcessingCompleted
3
...
METR-048
ProcessingStarted
29
...
METR-005
ProcessingCompleted
36
...
METR-011
MaterialUnloaded
12
...
METR-056
MaterialLoaded
96
...
METR-058
ControlStateChanged
6
...
METR-006
MaterialLoaded
94
...
METR-051
ProcessingStarted
3
...
METR-011
ProcessingCompleted
0
...
METR-020
ProcessingCompleted
10
...
METR-020
MaterialUnloaded
9
...
METR-065
ControlStateChanged
22
...