FabView
Semiconductor Fab
Dashboard
Litho
Etch
Thin Films
Metrology
Implant
Diffusion
Dielectrics
CMP
Query Studio
System Admin
Change Theme
Toggle Sidebar
FabView
...
Implant Dashboard
Real-time status, alarms, and events for all Implant tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
IMPL-001
IMPL-002
IMPL-003
IMPL-004
IMPL-005
IMPL-006
IMPL-007
IMPL-008
IMPL-009
IMPL-010
IMPL-011
IMPL-012
IMPL-013
IMPL-014
IMPL-015
IMPL-016
IMPL-017
IMPL-018
IMPL-019
IMPL-020
IMPL-021
IMPL-022
IMPL-023
IMPL-024
IMPL-025
IMPL-026
IMPL-027
IMPL-028
IMPL-029
IMPL-030
IMPL-031
IMPL-032
IMPL-033
IMPL-034
IMPL-035
IMPL-036
IMPL-037
IMPL-038
IMPL-039
IMPL-040
IMPL-041
IMPL-042
IMPL-043
IMPL-044
IMPL-045
IMPL-046
IMPL-047
IMPL-048
IMPL-049
IMPL-050
IMPL-051
IMPL-052
IMPL-053
IMPL-054
IMPL-055
IMPL-056
IMPL-057
IMPL-058
IMPL-059
IMPL-060
IMPL-061
IMPL-062
IMPL-063
IMPL-064
IMPL-065
IMPL-066
IMPL-067
IMPL-068
IMPL-069
IMPL-070
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Engineering
Scheduled Down
Unscheduled Down
Processing
Idle
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
IMPL-035
Minor
Ion source filament failure
...
IMPL-069
Minor
Ion source filament failure
...
IMPL-052
Critical
Ion source filament failure
...
IMPL-010
Critical
Beam current out of spec
...
IMPL-022
Warning
Ion source filament failure
...
IMPL-062
Minor
Ion source filament failure
...
IMPL-012
Major
Dose accuracy fault
...
IMPL-065
Major
Beam current out of spec
...
IMPL-039
Warning
Ion source filament failure
...
IMPL-035
Warning
Ion source filament failure
...
IMPL-008
Critical
Ion source filament failure
...
IMPL-049
Warning
Beam current out of spec
...
IMPL-041
Critical
Ion source filament failure
...
IMPL-023
Minor
Ion source filament failure
...
IMPL-070
Major
Beam current out of spec
...
IMPL-068
Warning
Ion source filament failure
...
IMPL-050
Major
Beam current out of spec
...
IMPL-034
Major
Ion source filament failure
...
IMPL-010
Warning
Dose accuracy fault
...
IMPL-010
Warning
Beam current out of spec
...
IMPL-042
Warning
Dose accuracy fault
...
IMPL-008
Major
Beam current out of spec
...
IMPL-069
Critical
Ion source filament failure
...
IMPL-061
Critical
Beam current out of spec
...
IMPL-057
Critical
Ion source filament failure
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
IMPL-057
ProcessingCompleted
0
...
IMPL-060
MaterialUnloaded
31
...
IMPL-003
ProcessingStarted
25
...
IMPL-031
ProcessingCompleted
23
...
IMPL-060
MaterialUnloaded
32
...
IMPL-041
ProcessingStarted
78
...
IMPL-064
ControlStateChanged
7
...
IMPL-037
ProcessingStarted
88
...
IMPL-028
ProcessingStarted
27
...
IMPL-061
ControlStateChanged
23
...
IMPL-056
ProcessingCompleted
25
...
IMPL-037
ProcessingStarted
8
...
IMPL-058
ControlStateChanged
85
...
IMPL-006
ControlStateChanged
4
...
IMPL-069
MaterialLoaded
1
...
IMPL-049
ControlStateChanged
0
...
IMPL-012
MaterialLoaded
37
...
IMPL-067
ProcessingCompleted
38
...
IMPL-062
MaterialUnloaded
19
...
IMPL-060
ProcessingStarted
85
...
IMPL-051
ProcessingStarted
2
...
IMPL-022
MaterialLoaded
78
...
IMPL-056
ProcessingCompleted
16
...
IMPL-036
ProcessingCompleted
38
...
IMPL-039
ProcessingStarted
29
...
IMPL-018
MaterialUnloaded
14
...
IMPL-033
ProcessingCompleted
24
...
IMPL-061
MaterialUnloaded
25
...
IMPL-043
ControlStateChanged
33
...
IMPL-022
ControlStateChanged
29
...
IMPL-008
ProcessingStarted
0
...
IMPL-020
MaterialLoaded
36
...
IMPL-009
ControlStateChanged
35
...
IMPL-016
MaterialUnloaded
22
...
IMPL-057
ProcessingStarted
37
...
IMPL-033
ProcessingStarted
11
...
IMPL-016
MaterialLoaded
17
...
IMPL-055
ProcessingCompleted
37
...
IMPL-035
MaterialUnloaded
0
...
IMPL-063
ProcessingStarted
21
...
IMPL-010
MaterialLoaded
11
...
IMPL-070
MaterialUnloaded
20
...
IMPL-028
ControlStateChanged
10
...
IMPL-029
MaterialUnloaded
34
...
IMPL-009
ProcessingCompleted
88
...
IMPL-006
MaterialLoaded
27
...
IMPL-067
ControlStateChanged
37
...
IMPL-016
ProcessingStarted
17
...
IMPL-029
ProcessingStarted
14
...
IMPL-029
ProcessingCompleted
37
...