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Implant Dashboard
Real-time status, alarms, and events for all Implant tools.
Live Fab Map
Real-time status of individual tools, updating every 5s. Click a tool to filter.
IMPL-001
IMPL-002
IMPL-003
IMPL-004
IMPL-005
IMPL-006
IMPL-007
IMPL-008
IMPL-009
IMPL-010
IMPL-011
IMPL-012
IMPL-013
IMPL-014
IMPL-015
IMPL-016
IMPL-017
IMPL-018
IMPL-019
IMPL-020
IMPL-021
IMPL-022
IMPL-023
IMPL-024
IMPL-025
IMPL-026
IMPL-027
IMPL-028
IMPL-029
IMPL-030
IMPL-031
IMPL-032
IMPL-033
IMPL-034
IMPL-035
IMPL-036
IMPL-037
IMPL-038
IMPL-039
IMPL-040
IMPL-041
IMPL-042
IMPL-043
IMPL-044
IMPL-045
IMPL-046
IMPL-047
IMPL-048
IMPL-049
IMPL-050
IMPL-051
IMPL-052
IMPL-053
IMPL-054
IMPL-055
IMPL-056
IMPL-057
IMPL-058
IMPL-059
IMPL-060
IMPL-061
IMPL-062
IMPL-063
IMPL-064
IMPL-065
IMPL-066
IMPL-067
IMPL-068
IMPL-069
IMPL-070
Tool State History
State transitions over the last 12 hours.
Tool State Distribution
Aggregate time in each state over the last 12 hours. Click a bar to filter.
Engineering
Scheduled Down
Unscheduled Down
Processing
Idle
Active Alarms
Recent critical and warning alarms from this tool set.
GenAI Summarization
Tool ID
Severity
Message
Time
IMPL-067
Minor
Beam current out of spec
...
IMPL-052
Critical
Dose accuracy fault
...
IMPL-002
Warning
Dose accuracy fault
...
IMPL-044
Critical
Ion source filament failure
...
IMPL-002
Major
Dose accuracy fault
...
IMPL-023
Critical
Beam current out of spec
...
IMPL-061
Major
Ion source filament failure
...
IMPL-023
Critical
Ion source filament failure
...
IMPL-026
Critical
Dose accuracy fault
...
IMPL-031
Warning
Dose accuracy fault
...
IMPL-041
Critical
Dose accuracy fault
...
IMPL-046
Critical
Dose accuracy fault
...
IMPL-040
Major
Ion source filament failure
...
IMPL-028
Warning
Dose accuracy fault
...
IMPL-010
Critical
Ion source filament failure
...
IMPL-028
Critical
Beam current out of spec
...
IMPL-062
Minor
Beam current out of spec
...
IMPL-050
Major
Beam current out of spec
...
IMPL-059
Minor
Ion source filament failure
...
IMPL-025
Major
Beam current out of spec
...
IMPL-061
Minor
Ion source filament failure
...
IMPL-051
Critical
Beam current out of spec
...
IMPL-040
Critical
Beam current out of spec
...
IMPL-001
Warning
Ion source filament failure
...
IMPL-069
Minor
Beam current out of spec
...
Recent Events (S6F11)
A live feed of SECS/GEM communication events.
Anomaly detection
Time-Series Transformer
Tool ID
Event
Anomaly Score
Time
IMPL-062
ControlStateChanged
15
...
IMPL-012
ProcessingCompleted
30
...
IMPL-026
ProcessingStarted
30
...
IMPL-068
MaterialUnloaded
37
...
IMPL-021
ControlStateChanged
11
...
IMPL-042
MaterialLoaded
4
...
IMPL-054
ProcessingCompleted
3
...
IMPL-041
ControlStateChanged
18
...
IMPL-034
MaterialUnloaded
18
...
IMPL-031
ControlStateChanged
12
...
IMPL-059
ProcessingCompleted
36
...
IMPL-069
ProcessingCompleted
27
...
IMPL-054
MaterialLoaded
2
...
IMPL-055
ControlStateChanged
24
...
IMPL-028
MaterialUnloaded
11
...
IMPL-026
ProcessingCompleted
90
...
IMPL-070
ProcessingCompleted
5
...
IMPL-009
ControlStateChanged
38
...
IMPL-025
MaterialUnloaded
97
...
IMPL-040
ProcessingCompleted
31
...
IMPL-061
MaterialUnloaded
0
...
IMPL-017
ProcessingStarted
22
...
IMPL-052
ControlStateChanged
15
...
IMPL-058
MaterialUnloaded
7
...
IMPL-027
ProcessingStarted
5
...
IMPL-009
ProcessingCompleted
33
...
IMPL-004
ProcessingCompleted
12
...
IMPL-045
ProcessingStarted
5
...
IMPL-067
ProcessingStarted
8
...
IMPL-005
ProcessingStarted
28
...
IMPL-009
ControlStateChanged
15
...
IMPL-004
MaterialUnloaded
15
...
IMPL-037
ProcessingStarted
0
...
IMPL-004
MaterialLoaded
21
...
IMPL-032
ProcessingStarted
13
...
IMPL-015
MaterialUnloaded
85
...
IMPL-022
ProcessingStarted
24
...
IMPL-068
MaterialLoaded
16
...
IMPL-019
ProcessingCompleted
31
...
IMPL-061
ControlStateChanged
22
...
IMPL-030
MaterialLoaded
72
...
IMPL-027
ProcessingCompleted
22
...
IMPL-042
ControlStateChanged
26
...
IMPL-057
ProcessingStarted
74
...
IMPL-013
MaterialLoaded
1
...
IMPL-014
MaterialLoaded
5
...
IMPL-063
MaterialLoaded
21
...
IMPL-047
MaterialUnloaded
24
...
IMPL-050
ProcessingCompleted
8
...
IMPL-042
ProcessingStarted
0
...